Systems and methods for harvesting and reducing contamination in nanowires
View Patent ↗The present invention is directed to methods to harvest, integrate and exploit nanomaterials, and particularly elongated nanowire materials. The invention provides methods for harvesting nanowires that include selectively etching a sacrificial layer placed on a nanowire growth substrate to remove nanowires. The invention also provides methods for integrating nanowires into electronic devices that include placing an outer surface of a cylinder in contact with a fluid suspension of nanowires and rolling the nanowire coated cylinder to deposit nanowires onto a surface. Methods are also provided to deposit nanowires using an ink-jet printer or an aperture to align nanowires. Additional aspects of the invention provide methods for preventing gate shorts in nanowire based transistors. Additional methods for harvesting and integrating nanowires are provided.
1. A process for depositing nanowires onto a substrate surface which comprises at least one pair of electrodes, comprising:
(a) placing at least a portion of the substrate surface into contact with a fluid suspension of nanowires;
(b) moving the fluid suspension and/or the substrate surface relative to one another; and
(c) applying an electric field between the at least one pair of electrodes to electrostatically deposit one or more of the nanowires on the substrate surface and align the one or more nanowires between the pair of electrodes so that each said electrostatically deposited one or more nanowires spans the pair of electrodes.
2. The process of claim 1 , wherein the placing comprises completely submerging the substrate surface into the fluid suspension of nanowires.
3. The process of claim 1 , wherein the moving comprises flowing the fluid suspension over at least a portion of the substrate surface.
4. The process of claim 1 , wherein the moving comprises translating at least a portion of the substrate surface through the fluid suspension.
5. The process of claim 1 , wherein the moving and the applying steps occur simultaneously.
6. The process of claim 1 , wherein the substrate surface is on at least a portion of the circumference of a cylinder.
7. The process of claim 6 , wherein the moving comprises rotating the cylinder through the fluid suspension.
8. The process of claim 6 , wherein the moving comprises rotating and translating the cylinder through the fluid suspension.
9. The process of claim 1 , wherein the substrate further comprises at least one gate electrode.
10. The process of claim 9 , wherein the substrate further comprises a dielectric layer between the at least one gate electrode and the one or more nanowires.
11. The process of claim 1 , wherein the one or more nanowires comprises a conformal gate electrode on at least one of said one or more nanowires.
12. The process of claim 11 , wherein the at least one nanowire comprising a conformal gate electrode and further comprises a semiconductor core and a shell; and the process further comprises etching a portion of the core to prevent an electrical short between the core and the conformal gate.
13. The process of claim 11 , wherein the at least one nanowire comprising a conformal gate electrode and further comprises a semiconductor core and a shell; and the process further comprises doping a portion of the core to prevent an electrical short between the core and the conformal gate.
14. The process of claim 1 , wherein the one or more nanowires comprises a dielectric shell layer.
15. The process of claim 1 , further comprising growing the nanowires on a growth substrate which comprises a first semiconductor material and a first sacrificial layer, wherein the first sacrificial layer is selectively removable relative to the first semiconductor material; and
selectively removing the first sacrificial layer to release the nanowires from the growth substrate.
16. The process of claim 15 , wherein the selective removing comprises selectively dissolving the first sacrificial layer without dissolving the nanowires.
17. The process of claim 15 , wherein the selective removing comprises selectively etching the first sacrificial layer.
18. The process of claim 1 , further comprising growing the nanowires on a growth substrate and mechanically or ultrasonically removing the nanowires from the growth substrate.
19. The process of claim 1 , further comprising removing the at least one pair of electrodes from the substrate surface after aligning the nanowires between the electrodes.
20. The process of claim 1 , wherein the electrodes comprise a liquid conductive medium.
21. The process of claim 1 , further comprising removing any oxide on the nanowires.
22. The process of claim 1 , further comprising removing any surface defects or contamination from the nanowires.