Apparatus and method for coating polyimide layer
View Patent ↗An apparatus for coating a polyimide layer includes a print table for receiving a substrate thereon, an inkjet head positioned over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate, and a polyimide liquid supply tank for supplying polyimide liquid, and a wiper movable from one side of the jetting surface to an other side of the jetting surface while the wiper contacts the jetting surface of the inkjet head.
1. An apparatus for coating a polyimide layer, comprising:
a print table for receiving a substrate thereon;
an inkjet head positioned over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate; and
a polyimide liquid supply tank for supplying polyimide liquid to the inkjet head;
a cleaning liquid supply tank for receiving cleaning liquid vessel filled with cleaning liquid; and
a wiper movable from one side of the jetting surface to an other side of the jetting surface while the wiper contacts the jetting surface of the inkjet head, wherein the wiper is supported by a supporter and is rotatable on the supporter so that the wiper is dipped into the cleaning liquid.
2. The apparatus for coating a polyimide layer according to claim 1 , wherein the wiper has an inclined wiping surface in contact with the jetting surface of the inkjet head.
3. The apparatus for coating a polyimide layer according to claim 2 , wherein the wiper has an inclined wiping surface with an inclination angle in a range of about 20 to 70 degrees.
4. The apparatus for coating a polyimide layer according to claim 1 , wherein the wiper is made of one of a perfluoro-based polymer or silicone-based polymer.
5. The apparatus for coating a polyimide layer according to claim 4 , wherein the wiper has in inclined wiping surface with an inclination angle in a range of about 20 to 70 degrees.
6. The apparatus for coating a polyimide layer according to claim 1 , wherein the wiper includes a first inclined wiping surface and a second inclined wiping surface that intersect at the center of the wiper.
7. The apparatus for coating a polyimide layer according to claim 6 , wherein an inclination angle between the first inclined wiping surface and the second inclined wiping surface is in a range of about 40 to 140 degrees.
8. The apparatus for coating a polyimide layer according to claim 1 , wherein the cleaning liquid includes N-Methyl pyrrolidone.
9. The apparatus for coating a polyimide layer according to claim 1 , wherein the polyimide liquid supply tank and the cleaning liquid supply tank are the same tank.
10. An apparatus for coating a polyimide layer, comprising:
a print table for receiving a substrate thereon;
an inkjet head positioned over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate; and
a polyimide liquid supply tank for supplying polyimide liquid;
a cleaning liquid supply tank for receiving a cleaning solution for removing cured or uncured polyimide; and
a wiper movable from one side of the inkjet head to an other side of the inkjet head while the wiper contacts the jetting surface of the inkjet head, wherein the wiper is supported by a supporter and is rotatable on the supporter so that the wiper is dipped into the cleaning liquid.
11. The apparatus for coating a polyimide layer according to claim 10 , wherein the wiper has an inclined wiping surface in contact with the jetting surface of the inkjet head.
12. The apparatus for coating a polyimide layer according to claim 10 , wherein the wiper includes a first inclined wiping surface and a second inclined wiping surface that intersect at the center of the wiper.