Apparatus and method for coating polyimide layer
An apparatus for coating polyimide layer includes a print table, an inkjet head, and a polyimide liquid supply tank, wherein the inkjet head is configured to jet the polyimide liquid in a scan-coating and be shifted by a predetermined shift pitch in a direction until 2N times of scan-coating occurs in which N≧2 and N is a natural number. A method for coating polyimide layer includes placing a substrate, loading a polyimide liquid vessel into a polyimide liquid supply tank, jetting the polyimide liquid onto the substrate in a scan-coating, repeating the jetting the polyimide liquid onto the substrate in a scan-coating and the shifting the inkjet head by a predetermined shift pitch until 2N times of scan-coating occurs in which N≧2 and N is a natural number.
1 . An apparatus for coating a polyimide layer, comprising:
a print table to receive a substrate thereon;
an inkjet head having a plurality of nozzles for jetting polyimide liquid onto the substrate; and
a polyimide liquid supply tank with polyimide liquid therein;
wherein the inkjet head is configured to jet the polyimide liquid in a scan-coating and be shifted by a predetermined shift pitch in a direction until 2N times of scan-coating occurs in which N≧2 and N is a natural number.
2 . The apparatus for coating polyimide layer according to claim 1 , the shift pitch is inversely proportional to the number of times of scan-coating.
3 . The apparatus for coating polyimide layer according to claim 1 , wherein the shift pitch is set to a value that is the sum of a nozzle pitch between nozzles provided to the inkjet head and an offset pitch.
4 . The apparatus for coating polyimide layer according to claim 3 , wherein the offset pitch value is ½N of the nozzle pitch.
5 . The apparatus for coating polyimide layer according to claim 1 , wherein the N is two (2) such that the number of times of scan-coating is four (4).
6 . The apparatus for coating polyimide layer according to claim 1 , wherein the N is four (4) such that the number of times of scan-coating is eight (8).
7 . A method for coating a polyimide layer, comprising:
placing a substrate on a print table;
loading a polyimide liquid into a polyimide liquid supply tank;
jetting the polyimide liquid onto the substrate in a scan-coating through a plurality of nozzles provided to the inkjet head after the polyimide liquid is supplied to the inkjet head installed over the print table; and
shifting the inkjet head by a predetermined shift pitch;
repeating the jetting the polyimide liquid onto the substrate in a scan-coating and the shifting the inkjet head by a predetermined shift pitch until 2N times of scan-coating occurs in which N≧2 and N is a natural number.
8 . The method for coating a polyimide layer according to claim 7 , wherein the shift pitch is set to be inversely proportional to the number of times of scanning.
9 . The method for coating a polyimide layer according to claim 7 , wherein the shift pitch is set to a value corresponding to the sum of a nozzle pitch between nozzles and an offset pitch.
10 . The method for coating a polyimide layer according to claim 9 , wherein the N is two (2) such that the number of times of scan-coating is four (4).
11 . The method for coating a polyimide layer according to claim 7 , wherein the N is two (2) such that the number of times of scan-coating is four (4).
12 . The method for coating a polyimide layer according to claim 7 , wherein the N is four (4) such that the number of times of scan-coating is eight (8).