Solar cell, uneven surface on an insulation layer as a screen mesh pattern, and manufacturing method thereof
View Patent ↗A solar cell and a manufacturing method thereof. A method of manufacturing a solar cell includes: forming an emitter layer on a first surface of a semiconductor substrate; forming an insulation layer on the emitter layer; applying a chemical compound including a dopant having a conductive type of the emitter layer on the insulation layer according to a pattern; forming a high concentration emitter portion by removing a portion of the insulation layer corresponding to a positioning of the chemical compound and diffusing the dopant toward the emitting layer; removing the chemical compound; and forming a first electrode electrically connected to the high concentration emitter portion.
1. A solar cell comprising:
a semiconductor substrate;
an emitter layer disposed on the semiconductor substrate;
a first electrode disposed on and electrically connected to the emitter layer in one or more first regions; and
an insulation layer disposed on one or more second regions of the emitter layer where the first electrode is not disposed,
wherein the emitter layer comprises a high concentration emitter portion corresponding to the one or more first regions in which the first electrode is disposed, and
wherein the insulation layer comprises a first substantially uneven surface on a first sidewall of the insulation layer and a second substantially uneven surface on a second sidewall of the insulation layer facing the first sidewall of the insulation layer, the first and second substantially uneven surfaces having a screen mesh pattern in contact with the first electrode.
2. The solar cell of claim 1 , wherein the high concentration emitter portion is formed by:
applying a chemical compound to a portion of the insulation layer, the chemical compound comprising a dopant;
performing thermal annealing to eliminate the portion of the insulation layer, thereby exposing a portion of the emitter layer, using the chemical compound; and
diffusing the dopant towards the exposed portion of the emitter layer.
3. The solar cell of claim 1 , wherein at least one of the surfaces of the insulation layer is a chemical etched surface.
4. The solar cell of claim 1 , wherein at least one of the surfaces of the insulation layer is patterned by utilizing a chemical compound for doping and etching the insulation layer.
5. The solar cell of claim 4 , wherein the chemical compound comprises phosphorus pentoxide (P 2 O 5 ) and/or phosphorus chloride oxide (POCl 3 ).
6. The solar cell of claim 1 , wherein the insulation layer comprises titanium oxide.