Examination apparatus
View Patent ↗The invention provides an examination apparatus including an objective optical system for positioning a focal point inside a specimen mounted on a stage; an image-acquisition apparatus for detecting light emitted in different optical-axis directions from the vicinity of the focal point inside the specimen and collected by the objective optical system to acquire a plurality of pieces of image information; and a three-dimensional image forming unit for forming a three-dimensional image of a light-emitting site in the vicinity of the focal point based on the plurality of pieces of image information acquired by the image-acquiring apparatus.
1. An examination apparatus comprising:
an objective optical system configured to position a focal point inside a specimen mounted on a stage, and to form images of a light-emitting site in a vicinity of the focal point inside the specimen from a plurality of different optical-axis directions by changing a relative angle to the stage;
an image-acquisition apparatus configured to detect each of the images, and to acquire a plurality of pieces of image information of the light-emitting site; and
a three-dimensional image forming unit configured to form a three-dimensional image of a light-emitting site in the vicinity of the focal point based on the plurality of pieces of image information acquired by the image-acquisition apparatus.
2. The examination apparatus according to claim 1 , wherein the image-acquisition apparatus includes a rotation apparatus configured to relatively rotate the specimen and the objective optical system about an axis intersecting the optical axis in the vicinity of the focal point.
3. The examination apparatus according to claim 2 , wherein the stage is fixed, and the rotation apparatus rotates the objective optical system relative to the stage.
4. The examination apparatus according to claim 2 wherein the objective optical system is fixed, and the rotation apparatus rotates the stage relative to the objective optical system.
5. The examination apparatus according to claim 1 wherein the image-acquisition apparatus includes a deflecting member configured to direct the light emitted in a plurality of directions from the vicinity of the focal point inside the specimen to the objective optical system, which is disposed in one direction with respect to the specimen.