Liquid crystal display device with double metal layer source and drain electrodes and fabricating method thereof
View Patent ↗A method of fabricating a liquid crystal display device includes, according to an embodiment of the present invention, forming a gate electrode on a substrate, forming a gate insulating layer over the gate electrode and on the substrate, forming a first metal layer on the first semiconductor layer and a second metal layer over the first metal layer, forming source and chain electrode by patterning a separation region in the first and second metal layers, and patterning the first metal layer and the first semiconductor layer in the same pattern.
1. A method of fabricating a liquid crystal display device, the method comprising the steps of:
forming a gate electrode on a substrate;
forming a gate insulating film over the gate electrode and on the substrate;
forming a first semiconductor layer over the gate insulating film;
forming a second semiconductor layer over the first semiconductor layer;
forming a first metal layer on the second semiconductor layer and a second metal layer over the first metal layer;
patterning the second metal layer by using a wet etch process;
patterning the first metal layer and the second semiconductor layer in a same pattern with the patterned second metal layer by using a dry etch process by using the patterned second metal layer as a mask;
forming a protective layer on the second metal layer; and
forming a pixel electrode on the protective layer,
wherein etched side walls of the first metal layer and the second semiconductor layer are substantially aligned with the side wall of the second metal layer.
2. The method device as claimed in claim 1 , wherein the first metal layer is formed from molybdenum (Mo) or titanium (Ti).
3. The method as claimed in claim 1 , wherein the data metal layer is formed from aluminum (Al), an Al alloy, copper (Cu) or a Cu alloy.
4. The method of claim 1 , wherein the step of patterning the first metal layer and the first semiconductor layer includes dry etching the first semiconductor layer and the first metal layer and further includes using the second metal layer as a mask.
5. A method of fabricating a liquid crystal display device, the method comprising the steps of:
forming a gate electrode on a substrate;
forming a gate insulating film on the substrate;
forming a first semiconductor layer over the gate insulating film;
forming a second semiconductor layer over the first semiconductor layer;
forming a first metal layer on the second semiconductor layer and a second metal layer over the first metal layer, wherein the second semiconductor layer is connected with the first semiconductor layer and the first metal layer;
patterning the second metal layer by wet etching to form a first separation region in the second metal layer;
patterning the second semiconductor layer and the first metal layer by using the patterned second metal layer as a mask by dry etching to form a second separation identical to the first separation region in the second semiconductor, and the first metal layer;
forming a protective layer on the gate insulating film; and
forming a pixel electrode on the protective layer,
wherein etched side walls of the first metal layer and the second semiconductor layer are substantially aligned with the side wall of the second metal layer.
6. The method device as claimed in claim 5 , wherein the first metal layer is made from molybdenum (Mo) or titanium (Ti).
7. The method as claimed in claim 5 , wherein the second metal layer is formed from or aluminum (Al), an Al alloy, copper (Cu) and a Cu alloy.