Area array modulation and lead reduction in interferometric modulators
View Patent ↗A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.
1. A MEMS device, comprising:
a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and
addressing lines configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.
2. The device of claim 1 , wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.
3. The device of claim 1 , wherein the elements are bi-stable.
4. The device of claim 1 , wherein the elements are light modulators.
5. The device of claim 1 , wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.
6. The device of claim 5 , wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, and residual stress.
7. The device of claim 1 , wherein the elements have differing areas.
8. The device of cxlaim 1 , wherein the elements share the same signals from the addressing lines.
9. A MEMS device, comprising:
a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and
means for providing signals of at least one of varying voltage and varying time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.
10. The device of claim 9 , wherein the providing means comprises addressing lines.
11. The device of claim 9 , wherein the elements are light modulators.
12. The device of claim 9 , wherein the elements comprise differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.
13. The device of claim 9 , wherein the elements comprise at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.
14. The device of claim 9 , wherein the elements share the same signals from the providing means.
15. A method of manufacturing a MEMS device, the method comprising:
forming a plurality of elements having differing values of at least one of a time-based activation threshold for a select voltage and a voltage-based activation threshold for a select time; and
connecting addressing lines to the plurality of elements, wherein the addressing lines are configured to provide signals of at least one of selectable voltage and selectable time to the elements such that different numbers of elements activate in a selectable manner, according to the voltage and time of the signals.
16. The method of claim 15 , wherein the addressing lines are configured to provide one signal for a row in the plurality of elements.
17. The method of claim 15 , wherein the elements are bi-stable.
18. The method of claim 15 , wherein the elements are light modulators.
19. The method of claim 15 , further comprising forming elements of differing mechanical structures so as to effect differing values of at least one of activation versus time and activation versus voltage.
20. The method of claim 19 , further comprising forming elements comprising at least one of differing mechanical support structure, differing film thicknesses, differing area and differing residual stress.
21. The method of claim 15 , wherein the addressing lines are connected to the elements such that the elements share the same signals from the addressing lines.