IP Library Granted Patent US 7,528,364
Granted Patent B2
US 7,528,364 · App. 11/649,952 · Granted May 5, 2009

Optical beam steering and sampling apparatus and method

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Quick Facts
Patent No.
US 7,528,364
App. No.
11/649,952
Granted
May 5, 2009
Kind
B2
Abstract

In a light (optical) beam steering/sampling system, a matrix inversion control technique is used to decouple the operation of the actuators which drive the steering mirrors. The control technique uses two virtual variables, each having an associated independent feedback loop operating in a non-cross-coupled manner, each variable being associated with one of the two steering mirrors.

Claims (37)

1. Apparatus comprising:

a first steering reflector on which a beam of light is incident;

a second steering reflector on which light reflected from the first steering reflector is incident;

a first beam splitter on which light reflected from the second steering reflector is incident;

a second beam splitter on which light reflected from the first beam splitter is incident;

a first detector on which light reflected from the first beam splitter is incident; and

a second detector on which light transmitted by the second beam splitter is incident;

wherein a first value is obtained which is a function of an output signal of both detectors is indicative of a state of the first steering reflector and not of the second steering reflector, and a second value is obtained which is a function of an output signal of both detectors is indicative of a state of the second steering reflector and not of the first steering reflector.

2. The apparatus of claim 1 , further comprising a controller coupled between the detectors and the steering reflectors, whereby the controller changes the state of the first steering reflector responsive to the first value and not the second value and changes the state of the second steering reflector responsive to the second value and not the first value.

3. The apparatus of claim 2 , the controller including two control loops, one control loop being associated with each of the first and second values.

4. The apparatus of claim 2 , wherein the controller includes means for calibrating the apparatus.

5. The apparatus of claim 1 , each steering reflector including a reflector coupled to an actuator.

6. The apparatus of claim 5 , each steering reflector having a second actuator coupled to the reflector to tilt the reflector in a direction substantially orthogonal to a direction in which the first actuator tilts that reflector.

7. The apparatus of claim 1 , wherein light transmitted by the first beam splitter is directed out of the apparatus.

8. The apparatus of claim 1 , further comprising a third reflector positioned to reflect the light transmitted by the second beam splitter to the second detector.

9. The apparatus of claim 1 , wherein each of the first and second values is obtained as a function of a displacement and an angle of the light beam incident on the apparatus.

10. The method of claim 1 , further comparing a first lens located to focus light onto the first detector and a second lens located to focus light onto the second detector.

11. The apparatus of claim 1 , wherein the first value and the second value respectively do not correspond to pointing or displacement of the beam of light.

12. Method for operating an optical apparatus having two steering reflectors, comprising the acts of:

splitting light reflected serially from the two steering reflectors;

splitting the split light, into two portions;

detecting a first portion of the twice split light;

detecting a second portion of the twice split light;

obtaining a first value which is a function of an output signal from both acts of detecting, the first value being indicative of a state of the first steering reflector and not of the second steering reflector; and

obtaining a second value which is a function of an output signal from both acts of detecting, the second value being indicative of a state of the second steering reflector and not of the first steering reflector.

13. The method of claim 12 , further comprising the act of:

controlling a state of the first steering reflector responsive to the first value and not the second value, and controlling a state of the second steering reflector responsive to the second value and not the first value.

14. The method of claim 13 , the controlling including:

providing two control loops, one control loop being associated with each of the first and second values.

15. The method of claim 12 , further comprising the act of changing the state of each steering reflector by an actuator.

16. The method of claim 15 , further comprising the act of providing a second actuator associated with each steering reflector to tilt the steering reflector in a direction substantially orthogonal to a direction in which the first actuator tilts that reflector.

17. The method of claim 12 , further comprising the act of directing externally a portion of the light which is split from the first act of splitting.

18. The method of claim 12 , further comprising the act of reflecting the second portion of the twice split light prior to the act of detecting same.

19. The method of claim 12 , wherein each of the first and second values is obtained as a function of a displacement and an angle of incident light.

20. The method of claim 12 , further comprising the act of calibrating the optical apparatus.

21. The method of claim 12 , further comprising the act of focusing the light prior to detecting same.

22. The method of claim 12 , wherein the two values respectively do not correspond to pointing or displacement of the light.

Assignments (11)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Feb 1, 2019
From: DEUTSCHE BANK AG NEW YORK BRANCH
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
Reel/Frame 048226/0095 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC; BARCLAYS BANK PLC
Reel/Frame 038663/0139 →
SECURITY AGREEMENT Recorded May 4, 2016
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH
Reel/Frame 038663/0265 →
RELEASE OF SECURITY INTEREST Recorded Apr 29, 2016
From: JPMORGAN CHASE BANK N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 038581/0112 →
SECURITY AGREEMENT Recorded Jul 22, 2013
From: NEWPORT CORPORATION
To: JPMORGAN CHASE BANK, NATIONAL ASSOCIATION, AS ADMINISTRATIVE AGENT
Reel/Frame 030847/0005 →
RELEASE OF SECURITY INTEREST Recorded Jul 19, 2013
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: NEWPORT CORPORATION
Reel/Frame 030833/0421 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2012
From: BOOKHAM TECHNOLOGY PLC
To: NEWPORT CORPORATION
Reel/Frame 027690/0415 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Oct 5, 2011
From: NEWPORT CORPORATION
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 027019/0462 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2009
From: BOOKHAM TECHNOLOGY
To: NEWPORT CORPORATION
Reel/Frame 023498/0574 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 4, 2007
From: FARINAS, ALEJANDRO D.; GREEN, EVAN D.
To: BOOKHAM TECHNOLOGY PLC
Reel/Frame 018780/0596 →