Semiconductor laser diode
View Patent ↗A semiconductor laser diode comprising a semiconductor substrate having an active layer with a pair of cavity facets opposed to each other on both ends of active layer as well as a first dielectric film of an oxide and a second dielectric film of an oxynitride successively stacked on one cavity facet has sufficient initial characteristics with a film structure having excellent heat radiability for allowing stable high-output lasing over a long period without reducing a catastrophic optical damage level on an emission end.
1. A semiconductor laser diode comprising:
a semiconductor substrate having an active layer with a pair of cavity facets opposed to each other on both ends of said active layer; and
a first dielectric film of aluminum oxynitride having a nitrogen content of 1 to 10% and a second dielectric film of aluminum oxynitride having an oxygen content of 5 to 10% successively stacked on one of said cavity facets.
2. The semiconductor laser diode according to claim 1 , wherein
the thickness of said first dielectric film is 3 to 20 nm.
3. The semiconductor laser diode according to claim 1 , wherein
the thickness of said second dielectric film is 30 to 100 nm.
4. The semiconductor laser diode according to claim 1 , further including a third dielectric film of an oxide stacked on said second dielectric film.
5. The semiconductor laser diode according to claim 4 , wherein
said third dielectric film is made of at least any material selected from aluminum oxide, silicon oxide, tantalum oxide, hafnium oxide, zirconium oxide, titanium oxide, niobium oxide, aluminum oxynitride, silicon oxynitride and silicon nitride.
6. The semiconductor laser diode according to claim 4 , wherein
the thickness of said third dielectric film is at least 20 nm.
7. The semiconductor laser diode according to claim 1 , wherein
said second dielectric film is made of an oxynitride prepared from a target of aluminum oxide (Al x O y (0<x<1, 0<y<0.6)) in an ECR sputtering apparatus.