Method of producing particles by physical vapor deposition in an ionic liquid

1. A method for producing particles, comprising the sequential steps of:

spreading an ionic liquid over a surface of a substrate, thereby forming an ionic liquid coated substrate,

introducing said ionic liquid coated substrate into a deposition chamber; and

moving said ionic liquid coated substrate under a physical vapor deposition target, thereby directing one or more materials onto the ionic liquid of the ionic liquid coated substrate by physical vapor deposition, and providing particles in the ionic liquid of the ionic liquid coated substrate.

2. The method of claim 1 , further including evacuating the deposition chamber.

3. The method of claim 2 , wherein the deposition chamber is evacuated to provide a vacuum of no greater than 10 microns of Hg.

4. The method of claim 2 , wherein the deposition chamber is evacuated to provide a vacuum of no greater than 7 microns of Hg.

5. The method of claim 1 , wherein the particles have a diameter no greater than 500 nm.

6. The method of claim 1 , wherein the particles have a diameter no greater than 200 nm.

7. The method of claim 1 , wherein the particles have a diameter in the range of 1 nm to 200 nm.

8. The method of claim 1 , wherein the ionic liquid comprises at least one cation selected from mono-, di-, and trisubstituted imidazoliums; substituted pyridiniums; substituted pyrrolidiniums; tetraalkyl phosphoniums; tetraalkyl ammoniums; guanidiniums; isouroniums; and thiouroniums.

9. The method of claim 1 , wherein the ionic liquid comprises at least one anion selected from chlorides; bromides; iodides; tetrafluoroborates; hexafluorophosphates; bis(trifluoromethylsulfonyl)imides; tris(pentafluoroethyl)trifluorophosphates (FAPs); trifluoromethanesulfonates; trifluoroacetates; methylsulfates; octylsulfates; thiocyanates; organoborates; and p-toluenesulfonates.

10. The method of claim 1 , wherein the ionic liquid is selected from 1-butyl-3-methylimidazolium hexafluorophosphate ([BMIM]PF 6 ), 1-hexyl-3-methylimidazolium tetrafluoroborate ([HMIM]BF 4 ), 1-butyl-3-methylimidazolium tetrafluoroborate ([BMIM]BF 4 ), and 1-ethyl-3-methylimidazolium trifluoromethane sulfonamide ([EMIM](CF 3 SO 2 ) 2 N).

11. The method of claim 1 , wherein the ionic liquid has a viscosity no greater than 1110 cP at a temperature of 23° C.

12. The method of claim 1 , wherein the depositing step is conducted by magnetron sputtering or electron beam evaporation.

13. The method of claim 12 , wherein the sputtering is conducted in a reactive atmosphere.

14. The method of claim 12 , wherein the sputtering is conducted in an evacuated atmosphere.

15. The method of claim 12 , wherein the sputtering is conducted in an inert atmosphere.

16. The method of claim 1 , wherein the ionic liquid comprises a mixture of two or more ionic liquids.

17. The method of claim 1 , including adjusting the viscosity of the ionic liquid.

18. The method of claim 17 , wherein the adjusting step is performed by adding one or more polymers or monomers to the ionic liquid.

19. The method of claim 1 , including adding one or more monomers or polymers to the ionic liquid.

20. The method of claim 19 , including reacting the monomers or polymers to form a polymeric material containing the particles.

21. The method of claim 1 , wherein said ionic liquid comprises at least one cation selected from the group consisting of, substituted pyridiniums; substituted pyrrolidiniums; tetraalkyl phosphoniums; tetraalkyl ammoniums; guanidiniums; isouroniums; and thiouroniums.

22. The method of claim 1 , further comprising moving said ionic liquid coated substrate more than one time under said physical vapor deposition target.

23. The method of claim 1 , further comprising depositing a multilayered coating by physical vapor deposition onto the ionic liquid of the ionic liquid coated substrate.

24. A method for producing particles, comprising:

introducing an ionic liquid into a deposition chamber; and

directing one or more materials onto the ionic liquid by physical vapor deposition to provide particles in the ionic liquid,

wherein said method further comprises adding one or more monomers to the ionic liquid.

25. The method of claim 24 , further comprising reacting the monomers to form a polymeric material containing the particles.