System for swept source optical coherence tomography
A swept source Optical coherence tomography system (SSOCT) comprises a vertical cavity surface-emitting laser with an integrated MEMs tunable mirror movable by electro-static deflection. The MEMs tunable VCSEL offers scan rates greater than 100 khz and tuning ranges approaching 200 nm around 1300 nm and 150 nm around 850 nm. In the preferred embodiment of this invention, a bottom mirror of the VCSEL is comprised of a Aluminum Gallium Arsenide/Aluminum Oxide DBR stack, and a movable top mirror is comprised of a TiO2/SiO2 DBR stack. A MEMs tunable VCSEL at 1300 nm is preferably pumped through the top mirror in a wavelength range between 1050 and 1120 nm, and a MEMs tunable VCSEL at 850 nm is preferably pumped through the top mirror in a wavelength range between 700 nm and 730 nm.
1. A system for swept source optical coherence tomography, the system comprising
A vertical cavity laser with an on-chip integrated MEMs tunable mirror, and operative to emit tunable radiation having an emission wavelength,
Means for directing said tunable radiation to a reference mirror and to a sample, and
An optical detector for detecting an interference between light reflected from said reference mirror and said sample,
Wherein said vertical cavity laser has a wavelength scan repetition rate of greater than about 100 kHz.
2. The system of claim 1 , wherein said vertical cavity laser is scanned at a frequency substantially equal to a mechanical resonance frequency of said MEMs tunable mirror.
3. The system of claim 1 , wherein at least one mirror of said vertical cavity laser includes alternating layers of GaAs and Aluminum Oxide.
4. The system of claim 1 , wherein at least one mirror of said vertical cavity laser includes alternating layers of TiO2 and SiO2.
5. The system of claim 1 , wherein said emission wavelength is tuned within a range from about 1200 nm to about 1400 nm.
6. The system of claim 1 , wherein said emission wavelength is tuned within a range from about 775 nm to about 925 nm.