IP Library Granted Patent US 7,531,795
Granted Patent B2
US 7,531,795 · App. 11/668,366 · Granted May 12, 2009

Scanning microscopy using resonant quantum tunneling

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Quick Facts
Patent No.
US 7,531,795
App. No.
11/668,366
Granted
May 12, 2009
Kind
B2
Abstract

In accordance with the invention, resonant quantum tunneling microscopy allows surface imaging while allowing characterization of physical properties associated with the surface.

Claims (24)

1. An apparatus for resonant quantum tunneling microscopy comprising:

a tip support structure;

first and second tunneling electrodes comprising first and second tips, said first and said second tunneling electrodes mechanically coupled to said tip support structure such that said first and said second tips are separated by a distance less than several nanometers and sufficiently large that resonant quantum tunneling does not occur directly between said first and said second tips.

2. The apparatus of claim 1 wherein an insulating xyz scanner is mechanically coupled to said tip support structure.

3. The apparatus of claim 2 wherein said insulating xyz scanner comprises a piezoelectric tube.

4. The apparatus of claim 1 wherein a vertical control actuator is mechanically coupled to said tip support structure.

5. The apparatus of claim 4 wherein said vertical control actuator comprises an electrostatic stepper motor.

6. The apparatus of claim 1 wherein said first tunneling electrode comprises a nanotube structure.

7. The apparatus of claim 1 wherein said tip support structure is microfabricated from silicon.

8. The apparatus of claim 1 wherein said first and said second tunneling electrodes are electrically coupled to a voltage source.

9. The apparatus of claim 1 wherein said first and said second tunneling electrodes are coupled to a current measuring device.

10. The apparatus of claim 1 wherein said apparatus is enclosed in a structure to allow for operation in a high vacuum environment.

11. An apparatus for resonant quantum tunneling microscopy comprising:

a tip support structure;

first and second tunneling electrodes comprising first and second tips, said first and said second tunneling electrodes mechanically coupled to said tip support structure such that said first and said second tips are separated by a distance that allows the flow of a tunneling current from said first tip to said second tip when said first and said second tips are proximate to a scanned spot.

12. The apparatus of claim 11 wherein an insulating xyz scanner is mechanically coupled to said tip support structure.

13. The apparatus of claim 12 wherein said insulating xyz scanner comprises a piezoelectric tube.

14. The apparatus of claim 11 wherein a vertical control actuator is mechanically coupled to said tip support structure.

15. The apparatus of claim 14 wherein said vertical control actuator comprises an electrostatic stepper motor.

16. The apparatus of claim 11 wherein said first tunneling electrode comprises a nanotube structure.

17. The apparatus of claim 11 wherein said tip support structure is microfabricated from silicon.

18. The apparatus of claim 11 wherein said first and said second tunneling electrodes are electrically coupled to a voltage source.

19. The apparatus of claim 11 wherein said first and said second tunneling electrodes are coupled to a current measuring device.

20. The apparatus of claim 11 wherein said apparatus is enclosed in a structure to allow for operation in a high vacuum environment.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 16, 2014
From: AGILENT TECHNOLOGIES, INC.
To: KEYSIGHT TECHNOLOGIES, INC.
Reel/Frame 033746/0714 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 29, 2007
From: FLORY, CURT A
To: AGILENT TECHNOLOGIES INC
Reel/Frame 018819/0541 →