Display apparatus and fabricating method thereof
View Patent ↗A method of fabricating a display apparatus includes depositing a first layer on a substrate while a mask is disposed at a first distance from the substrate, and forming a second layer on the substrate while the mask is disposed at a second distance larger than the first distance from the substrate after forming the first layer. Thus, the present invention provides a method of fabricating a display apparatus, in which a single mask is used in forming an electron injection layer and a common electrode.
1. A method of fabricating a display apparatus, the method comprising:
depositing a first layer on a substrate while a mask is disposed at a first distance from the substrate; and
forming a second layer on the substrate while the mask is disposed at a second distance larger than the first distance from the substrate after forming the first layer,
wherein depositing the first layer includes depositing an electron injecting material to form an electron injecting layer, and forming the second layer includes depositing a common electrode material to form a common electrode.
2. The method according to claim 1 , wherein depositing the first layer includes forming the first layer in a first region, and forming the second layer includes forming the second layer in the first region and in a second region surrounding the first region.
3. The method according to claim 2 , further comprising forming an encapsulation passivation film on the second layer while the mask is disposed at a third distance larger than the second distance from the substrate.
4. The method according to claim 2 , wherein the first region corresponds to a display region.
5. The method according to claim 2 , wherein depositing the first layer and forming the second layer include using a heat evaporation process.
6. The method according to claim 5 , wherein the substrate is formed with an organic layer thereon, and depositing the first layer and forming the second layer are performed in a state where the organic layer of the substrate is disposed to face downward.
7. The method according to claim 5 , wherein the substrate is formed with an organic layer thereon, and depositing the first layer and forming the second layer are performed in a state where the substrate is disposed in a standing direction.
8. The method according to claim 1 , wherein the substrate is provided by
forming a thin film transistor on an insulating substrate;
forming a pixel electrode connected to the thin film transistor; and
forming an organic layer on the pixel electrode.
9. The method according to claim 8 , wherein the organic layer comprises material of low molecular weight, and the first layer comprises lithium (Li) and fluorine (F).
10. The method according to claim 8 , wherein the organic layer comprises polymer, and the first layer comprises calcium (Ca) and barium (Ba).
11. The method according to claim 1 , wherein the second layer comprises aluminum (Al).
12. The method according to claim 1 , wherein the second layer has a thickness between 4,000 Å and 8,000 Å.