MEMS ACTUATORS AND SWITCHES
Micro-electromechanical systems (MEMS) actuators and switches exhibiting geometries and configurations providing superior operating characteristics and longer lifetimes.
1 . A Microelectromechanical (MEMS) actuator comprising:
a hot arm member; and
a cold arm member;
CHARACTERIZED IN THAT:
the hot arm member exhibits an asymmetric length.
2 . The MEMS actuator of claim 1 wherein said asymmetric hot arm member includes a first portion and a second portion wherein one of said portions is longer than the other portion.
3 . The MEMS actuator of claim 2 wherein one of said portions is wider than the other portion.
4 . The MEMS actuator of claim 1 further comprising:
a substrate upon which a portion of the actuator is anchored; and
a second actuator anchored to the substrate at a portion thereof;
wherein each of said actuators includes a tip member which mechanically contact one another upon actuation.
5 . The MEMS actuator of claim 4 wherein each tip member includes a flange and where at least one of said flanges includes a bump disposed thereon.
6 . The MEMS actuator of claim 4 wherein each tip member includes a flange at least one of which is angled.
7 . The MEMS actuator of claim 6 wherein an angle associated with each angled flange is between 45 and 90 degrees.
8 . The MEMS actuator of claim 1 further comprising:
means for mechanically latching the actuator to a similar actuator.
9 . The MEMS actuator of claim 8 further comprising
means for increasing contact pressure associated with latched actuators.
10 . The MEMS actuator of claim 8 further comprising
means for self-wiping the mechanical latch.
11 . A MEMS actuator comprising:
a hot arm member; and
a cold arm member having an asymmetric width.
12 . The MEMS actuator of claim 11 further CHARACTERIZED IN THAT:
the cold arm member has a free end and a fixed end wherein the width of the cold arm member is wider at a portion thereof nearer the fixed end than the free end.
13 . The MEMS actuator of claim 12 further CHARACTERIZED IN THAT:
the cold arm member includes a tip member at its free end for making mechanical and/or electrical contact with a tip member of another actuator.
14 . The MEMS actuator of claim 12 further CHARACTERIZED IN THAT:
the tip member includes a means for increasing the contact pressure exerted by the tip member on the tip member of the other actuator
15 . The MEMS actuator of claim 14 further CHARACTERIZED IN THAT:
the tip member includes a means for latching an actuator into a deflected position.
16 . The MEMS actuator of claim 15 further CHARACTERIZED IN THAT:
the tip member includes a means for self wiping.
17 . A MEMS switch comprising:
a substrate;
a first actuator anchored to the substrate; and
a second actuator anchored to the substrate;
wherein one of the actuators is an asymmetric actuator and mechanically contact one another upon the application of an actuating voltage.
18 . The MEMS switch of claim 17 further comprising a means for mechanically latching the two actuators together.
19 . The MEMS switch of claim 18 further comprising a means for increasing the contact pressure between the mechanically latched actuators.
20 . The MEMS switch of claim 18 further comprising a means for self-wiping the mechanical latching means.
21 . A Microelectromechanical (MEMS) actuator disposed upon a substrate, said actuator comprising:
a hot arm member having an end anchored to the substrate and a movable free end; and
a cold arm member;
CHARACTERIZED IN THAT:
the hot arm member exhibits an asymmetric width.
22 . The MEMS actuator of claim 22 FURTHER CHARACTERIZED IN THAT the anchored end of the hot arm member exhibits a width w 1 and the free end exhibits a width w 2 , wherein w 2 >w 1 .
23 . The MEMS actuator of claim 21 FURTHER CHARACTERIZED IN THAT the width of the hot arm member increases as one moves along its length away from the anchored end.
24 . A method of operating a Microelectromechanical (MEMS) switch, said switch comprising:
a substrate;
a first actuator disposed upon the substrate, said first actuator having an anchored end and a free end including a latch;
a second actuator disposed upon the substrate, said second actuator having an anchored end and a free end including a latch;
wherein each of said first and second actuators are normally in an undeflected position and may be independently moved to a respective deflected position upon the application of a respective actuating voltage;
wherein the movements of the actuators are substantially perpendicular to one another over an actuating distance;
the method of operating the MEMS switch comprising the steps of:
actuating one of the actuators such that its free end including the latch is deflected towards the free end of the other actuator;
actuating the other actuator such that its free end including the latch is deflected towards the free end of the other actuator; and
deactuating one of the deflected actuators such that the latches engage one another.
25 . The method of claim 24 further comprising the step of deactuating the other deflected actuator.
26 . The method of claim 25 wherein said latches are angled latches.