Semiconductor device and method of manufacturing the same
View Patent ↗An isolation insulating film ( 5 ) of partial-trench type is selectively formed in an upper surface of a silicon layer ( 4 ). A power supply line ( 21 ) is formed above the isolation insulating film ( 5 ). Below the power supply line ( 21 ), a complete isolation portion ( 23 ) reaching an upper surface of an insulating film ( 3 ) is formed in the isolation insulating film ( 5 ). In other words, a semiconductor device comprises a complete-isolation insulating film which is so formed as to extend from the upper surface of the silicon layer ( 4 ) and reach the upper surface of insulating film ( 3 ) below the power supply line ( 21 ). With this structure, it is possible to obtain the semiconductor device capable of suppressing variation in potential of a body region caused by variation in potential of the power supply line.
1. A semiconductor device comprising:
an SOI substrate having a structure in which a semiconductor substrate, an insulating layer and a semiconductor layer are layered in this order, the semiconductor substrate being in contact with the insulating layer;
a first isolation insulating film formed in a main surface of said semiconductor layer and said semiconductor layer existing between said first isolation insulating film and said insulating layer;
a first semiconductor element formed in an element formation region isolated by said first isolation insulating film in said semiconductor layer;
a second semiconductor element formed adjacently to said first semiconductor element in said semiconductor layer, having an operating frequency different from that of said first semiconductor element; and
a second isolation insulating film formed in said semiconductor layer and reaching said insulating layer between said first semiconductor element and said second semiconductor element; and
an interlayer insulating film formed on said first and second semiconductor elements and said first and second isolation insulating film.
2. The semiconductor device according to claim 1 , further comprising:
a signal line formed on said interlayer insulating film, being electrically connected to said first semiconductor element; wherein
said second isolation insulating film formed extending from said main surface of said semiconductor layer, reaching an upper surface of said insulating layer below said signal line.
3. The semiconductor device according to claim 2 , wherein said signal line is made of metal.
4. The semiconductor device according to claim 2 , wherein said signal line is made of polysilicon.