Semiconductor device and manufacturing method thereof
View Patent ↗In manufacturing a semiconductor device, the first gettering layer is formed on the backside of a wafer, and the second gettering layers are then formed on the backside and side surfaces of a chip, allowing these gettering layers to serve as trapping sites against metallic contamination that generated after backside grinding in assembly processes.
1. A manufacturing method of a semiconductor device, comprising:
a backside grinding step; and
a first gettering step for forming a first gettering layer on a backside of a wafer which is backside-grinded in the backside grinding step, wherein, in the first gettering step, the first gettering layer is formed by introducing an impurity into the backside of the wafer and the first gettering layer is formed by applying a thermal treatment to the ground backside of the wafer in an atmosphere containing an impurity at backside temperature ranging from 300 to 900 degrees centigrade with treatment time of 0.01 seconds or longer but not exceeding 10 seconds, wherein the semiconductor device, with the first gettering layer, is subjected to resin sealing.
2. A manufacturing method of a semiconductor device, wherein the thermal treatment according to claim 1 is a treatment for irradiating laser beam irradiation to the backside of the chip.
3. A manufacturing method of a semiconductor device, wherein the impurity according to the claim 1 contains any of oxygen, argon, carbon, nitrogen, boron, phosphorous, arsenic, antimony, or a chemical compound thereof.
4. A manufacturing method of a semiconductor device, comprising:
a backside grinding step;
a first gettering step for forming a first gettering layer on a backside of a wafer which is backside-grinded in the backside grinding step, wherein, in the first gettering step, the first gettering layer is formed by introducing an impurity into the backside of the wafer;
a dicing step; and
a second gettering step for forming second gettering layers on backside and side surface of a diced chip, wherein, in the second gettering step, the second gettering layers are formed by introducing an impurity to the backside and side surface of the chip, wherein the semiconductor device, with the first and second gettering layers, is subjected to resin sealing.
5. A manufacturing method of a semiconductor device wherein, in the second gettering step according to claim 4 , the second gettering layers are formed by applying a thermal treatment to the backside and side surface of the chip in an atmosphere containing an impurity at backside temperature ranging from 300 to 900 degrees centigrade with treatment time of 0.01 second or longer but not exceeding 10 seconds.
6. A manufacturing method of a semiconductor device, wherein the thermal treatment according to claim 5 is performed by pressing the backside of the chip against a hot material.
7. A manufacturing method of a semiconductor device, wherein the impurity according to claim 4 contains any of oxygen, argon, carbon, nitrogen, boron, phosphorous, arsenic, antimony, or a chemical compound thereof.
8. A manufacturing method of a semiconductor device, comprising:
a backside grinding step; and
a first gettering step for forming a first gettering layer on a backside of a wafer which is backside-grinded in the backside grinding step, wherein, in the first gettering step, the first gettering layer is formed by introducing an impurity into the backside of the wafer, wherein a depth of the first gettering layer and an average depth of a grinding damaged layer caused by the backside grinding step are the same.
9. The manufacturing method according to claim 4 , wherein a depth of the first gettering layer and an average depth of a grinding damaged layer caused by the backside grinding step are the same, and wherein a concentration of the first gettering layer due to the second gettering step is doubled and a depth of the second gettering layer and an average depth of a damaged layer caused by the dicing step are the same.