Display apparatus and method of manufacturing thereof
View Patent ↗A display apparatus, such as an organic light emitting diode (“OLED”) display, is driven by thin film transistors (“TFTs”), including a driving TFT and a switching TFT, and a pixel electrode. The display apparatus includes an amorphous silicon layer for the switching TFT and a microcrystalline silicon or polycrystalline silicon layer for the driving TFT. The amorphous silicon layer and the microcrystalline silicon layer are separated by an insulating layer. The apparatus provides product reliability and high image quality. A method of manufacturing the apparatus is characterized by reducing processing steps, and using a special mask which is a half tone mask or a slit mask adapted to forming a source electrode and a drain electrode of the switching TFT or the driving TFT and a semiconductor layer during a photolithographic process.
1. A method of manufacturing a display apparatus, the method comprising:
forming a first gate electrode and a second gate electrode on a substrate;
forming a first insulating layer on the substrate, the substrate including the first gate electrode and the second gate electrode;
forming a first semiconductor layer, a first source electrode and a first drain electrode using a first mask on the substrate, the substrate including the first insulating layer, the first semiconductor layer overlapping a portion of the first gate electrode on the first insulating layer, the first source electrode and the first drain electrode disposed on the first semiconductor layer;
forming a second insulating layer on the substrate, the substrate including the first source electrode and the first drain electrode;
forming a second semiconductor layer, a second source electrode and a second drain electrode using a second mask on the substrate, the substrate including the second insulating layer, the second semiconductor layer overlapping a portion of the second gate electrode on the second insulating layer, the second source electrode and the second drain electrode disposed on the second semiconductor layer;
forming a connector connecting the first gate electrode to the second drain electrode; and
forming a pixel electrode,
wherein the first semiconductor layer, the first source electrode, and the first drain electrode are made by a photolithographic process, and/or the second semiconductor layer, the second source electrode, and the second drain electrode are made by a photolithographic process.
2. The method of manufacturing a display apparatus of claim 1 , wherein forming the first semiconductor layer comprises forming an amorphous silicon layer and crystallizing the amorphous silicon layer to a poly crystalline silicon layer.
3. The method of manufacturing a display apparatus of claim 2 , wherein the first semiconductor layer, the first source electrode, and the first drain electrode are made by a photolithographic process using a photo mask, and the second semiconductor layer, the second source electrode, and the second drain electrode are made by a photolithographic process using a photo mask.
4. The method of manufacturing a display apparatus of claim 3 , further comprising forming a third insulating layer on the second source electrode and the second drain electrode and forming contact holes in the third insulating layer before forming the connector and forming the pixel electrode.
5. The method of manufacturing a display apparatus claim 4 , wherein crystallizing the amorphous silicon layer to a poly crystalline silicon layer is performed by a solid state crystallization method.