Method of forming thin film transistor substrate
A thin film transistor substrate and a fabricating method thereof wherein a contacting size between an electrode and an active layer can be reduced to provide a small and light panel. In the thin film transistor substrate, a conductive layer is formed on the substrate. A first insulating layer for insulating the conductive layer overlies the conductive layer. A second insulating layer this is different from the first insulating layer overlies the first insulating layer. A third insulating layer overlies the second insulating layer. A contact through the first, second, and third insulating layers exposes a portion of the conductive layer and has a trapezoidal section. An electrode is connected to the conductive layer and overlies a portion of an inclined face of the contact hole. The inclined face of the contact hole includes a protrusion formed by a portion of the second insulating layer and creates an overhang structure.
1. A method of fabricating a thin film transistor substrate comprising the steps of:
providing a substrate;
forming an active layer on the substrate;
forming a first insulating layer for insulating the active layer on the substrate;
forming a second insulating layer on the first insulating layer, wherein the second insulating layer comprises a material different from the first insulating layer;
forming a third insulating layer on the second insulating layer;
forming a contact hole through the first, second, and third insulating layers to expose a portion of the active layer;
forming an electrode connected to the active layer and provided on only a portion of an inclined face of the contact hole; and
providing a protrusion creating an overhang structure at one side of an inclined face of the contact hole.
2. The method as claimed in claim 1 , wherein said step of providing the protrusion comprises:
etching the third insulating layer by at least one of a dry etching method or a wet etching method;
etching the second insulating layer by at least one of the dry etching method or the wet etching method; and
etching the first insulating layer by the wet etching method.
3. The method as claimed in claim 2 , wherein the first insulating layer is etched only by the wet etching method.
4. The method as claimed in claim 2 , wherein the wet etching method comprises at least one of: etching the third insulating layer using a first etchant or etching the second insulating layer using a second etchant.
5. The method as claimed in claim 4 , wherein the wet etching method further comprises etching the first insulating layer using the first etchant.
6. The method as claimed in claim 2 , wherein the wet etching method comprises etching the third insulating layer and second insulating layer using a first etchant.
7. The method as claimed in claim 6 , wherein the wet etching method further comprises etching the first insulating layer using the first etchant.
8. The method as claimed in claim 2 , wherein the second insulating layer is etched using both the dry etching method and the wet etching method, and a ratio of a number of times the dry etching method is used to a number of times the wet etching method is used is about 80˜50:20˜50.
9. The method as claimed in claim 2 , wherein an etchant liquid used in the wet etching method comprises at least one of a buffered oxide etchant (BOE) or a buffered HF, and an etchant gas used in the dry etching process comprises at least one of SF 6 or CF 4 .
10. The method as claimed in claim 1 , wherein the first and third insulating layers comprise an inorganic insulating material, and the second insulating layer comprises an inorganic insulating material having good adhesive force to a metal and that is different from the third insulating layer.
11. The method as claimed in claim 10 , wherein the first and third insulating layers comprise SiO 2 and the second insulating layer comprises SiN x .
12. The method as claimed in claim 1 , wherein a thickness of the second insulating layer is greater than about 500 Å and less than about 1.5 times the thickness of the first insulating layer.
13. The method as claimed in claim 1 , wherein the contact has a trapezoidal section.