Multi-domain vertical alignment pixel structure
A multi-domain vertical alignment pixel structure including an active device, a passivation layer, a first pixel electrode, a second pixel electrode, a capacitor-coupling electrode and a semiconductor layer is provided. The active device is disposed on the substrate and has an insulating layer, the passivation layer covers the active device and a part of the insulating layer, the first pixel electrode and second pixel electrode are disposed on the passivation layer and electrically insulated from each other. In addition, the capacitor-coupling electrode is disposed between the second pixel electrode and the substrate. The semiconductor layer is disposed between the insulating layer and the passivation layer, wherein the insulating layer and the passivation layer have a trench and a lateral etched groove located on the sidewall of the trench, and the lateral etched groove exposes the side edge of the semiconductor layer.
1. A multi-domain vertical alignment pixel structure disposed on a substrate, comprising:
an active device, disposed on the substrate, wherein the active device has an insulating layer extending to outside the active device and covering the substrate;
a passivation layer, covering the active device and a part of the insulating layer;
a first pixel electrode, disposed on the passivation layer and electrically connected to the active device;
a second pixel electrode, disposed on the passivation layer and electrically insulated from the first pixel electrode;
a capacitor-coupling electrode, disposed between the second pixel electrode and the substrate, wherein the capacitor-coupling electrode is electrically connected to the active device; and
a semiconductor layer, disposed between the insulating layer and the passivation layer, wherein the insulating layer and the passivation layer have a trench and a lateral etched groove located on a sidewall of the trench, while the lateral etched groove exposes the side edge of the semiconductor layer.
2. The multi-domain vertical alignment pixel structure according to claim 1 , wherein the lateral etched groove is located on the sidewall of the trench adjacent to the first pixel electrode.
3. The multi-domain vertical alignment pixel structure according to claim 2 , wherein the lateral etched groove is further located on the sidewall of the trench adjacent to the second pixel electrode.
4. The multi-domain vertical alignment pixel structure according to claim 1 , wherein the lateral etched groove is located on the sidewall of the trench adjacent to the second pixel electrode.
5. The multi-domain vertical alignment pixel structure according to claim 1 , wherein the semiconductor layer comprises an amorphous silicon (a-Si) layer.
6. The multi-domain vertical alignment pixel structure according to claim 1 , further comprising a storage capacitor disposed on the substrate, wherein the storage capacitor is electrically connected to the active device.
7. The multi-domain vertical alignment pixel structure according to claim 6 , wherein the storage capacitor comprises:
a first capacitor electrode, disposed on the substrate and is covered by the insulating layer; and
a second capacitor electrode, disposed on the insulating layer over the first capacitor electrode and electrically connected to the active device.
8. The multi-domain vertical alignment pixel structure according to claim 7 , wherein the capacitor-coupling electrode is electrically connected to the active device through the second capacitor electrode.
9. The multi-domain vertical alignment pixel structure according to claim 1 , wherein the capacitor-coupling electrode is located between the insulating layer and the passivation layer.
10. The multi-domain vertical alignment pixel structure according to claim 1 , wherein the active device further comprises:
a gate, disposed on the substrate, wherein the insulating layer covers the gate;
a channel layer, disposed on the insulating layer over the gate; and
a source and a drain, disposed on the channel layer, wherein the source and the drain are located at both sides of the gate.
11. The multi-domain vertical alignment pixel structure according to claim 10 , wherein the active device further comprises an ohmic contact layer disposed between the channel layer and the source/drain.
12. A multi-domain vertical alignment pixel structure disposed on a substrate, comprising:
an active device, disposed on the substrate;
a dielectric layer, disposed on the substrate;
a first pixel electrode, disposed on the dielectric layer and electrically connected to the active device;
a second pixel electrode, disposed on the dielectric layer and electrically insulated from the first pixel electrode;
a capacitor-coupling electrode, disposed between the second pixel electrode and the substrate, wherein the capacitor-coupling electrode is electrically connected to the active device; and
a lateral etched material layer, disposed in the dielectric layer, wherein the dielectric layer has a trench and a lateral etched groove located on a sidewall of the trench, while the lateral etched groove exposes the side edge of the lateral etched material layer.