Method for manufacturing piezoelectric resonator element
A method for manufacturing a piezoelectric resonator element that ensures enough heat dissipation from a piezoelectric substrate, prevents a crack in the piezoelectric substrate, and avoids variation in an etching form when the piezoelectric resonator element is formed by dry etching the piezoelectric substrate is provided. The method includes a first step for placing a quartz crystal substrate 10 on a cooling plate 50 and dry etching the piezoelectric substrate from a main surface on one side that does not contact with the cooling plate 50 along an outline shape portion 20 having a shape along an outline of a tuning-fork crystal resonator element 1 in a cross-section direction of the quartz crystal substrate 10 , and a second step for placing a main surface on the one side dry etched in the first step facing the cooling plate 50 and the portion to be cut off contact with the cooling plate, and dry etching a main surface on the other side along the outline shape portion 20 in the cross-section direction of the quartz crystal substrate 10.
1 . A method for manufacturing a piezoelectric resonator element to form the piezoelectric resonator element by etching a piezoelectric substrate having a main surfaces on both front and rear sides to and detaching the piezoelectric resonator element from a portion to be cut off, comprising:
a first step for placing the piezoelectric substrate on a cooling plate and dry etching the piezoelectric substrate from a main surface on one side that does not contact with the cooling plate along an outline shape portion having a shape along an outline of the piezoelectric resonator element in a cross-section direction of the piezoelectric substrate; and
a second step for placing a main surface on the one side dry etched in the first step facing the cooling plate to and the portion to be cut off contact with the cooling plate, and dry etching a main surface on the other side along the outline shape portion in the cross-section direction of the piezoelectric substrate.
2 . The method for manufacturing a piezoelectric resonator element according to claim 1 , wherein the second step is a step to dry etch the outline shape portion to leave a part of the outline shape portion, and including a third step for removing the outline shape portion by wet etching afterwards.