Thin film transistor array panel and method of manufacture
View Patent ↗A method of manufacturing a thin film transistor array panel, including: forming gate lines on a substrate; forming a gate insulating layer on the gate lines; forming semiconductor layers on the gate insulating layer; forming data lines and drain electrodes on the semiconductor layers; depositing a passivation layer on the data lines and the drain electrodes; forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer; forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask; removing the second portion of the first photoresist; forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask; depositing a conductor layer; and forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.
1. A method of manufacturing a thin film transistor array panel, comprising:
forming gate lines including pads provided so as to be connected to another layer or an external device on a substrate;
forming a gate insulating layer on the gate lines;
forming semiconductor layers on the gate insulating layer;
forming data lines including pads for connection to another layer or an external device, and drain electrodes on the semiconductor layers;
depositing a passivation layer on the data lines and the drain electrodes;
forming a first photoresist layer including a first portion and a second portion that is thinner than the first portion on the passivation layer;
forming a first preliminary contact hole exposing the data lines by etching the passivation layer by using the first photoresist layer as a mask;
removing the second portion of the first photoresist;
forming a first contact hole by expanding the first preliminary contact hole and opening portions by etching the passivation layer by using the first portion of the first photoresist layer as a mask;
depositing a conductor layer; and
forming pixel electrodes in the opening portions and a first contact assistant member in the first contact hole by removing the first photoresist layer and the conductor layer located thereon.
2. The method of claim 1 , wherein forming a second preliminary contact hole exposing a part of the gate lines by etching the passivation layer and the gate insulating layers by using the first photoresist layer as a mask is carried out together with the forming of the first preliminary contact hole.
3. The method of claim 2 , wherein forming a second contact hole by expanding the second preliminary contact hole by etching the passivation layer and the gate insulating layer by using the first portion of the first photoresist layer as a mask is carried out together with the forming of the first contact hole.
4. The method of claim 3 , wherein forming a second contact assistant member in the second contact hole is carried out together with the forming of the first contact assistant member.
5. The method of claim 3 , wherein the second preliminary contact hole is expanded toward any one of the directions in the forming of the second contact hole by expanding the second preliminary contact hole.
6. The method of claim 5 , wherein the ratio of the second portion of the first photoresist layer formed on a part of the pads of the gate lines and the pads of the data lines to the portion not having the first photoresist layer formed on the pads of the gate lines and the pads of the data lines is in the range of 1-10:1-10.
7. The method of claim 1 , wherein the forming of the first photoresist layer including the first portion and the second portion uses a photomask including a light blocking area, a slit-shaped translucent area, and a light transmitting area.
8. The method of claim 7 , wherein the second portion of the first photoresist layer is formed so as to face the slit-shaped translucent area.
9. The method of claim 8 , wherein the second portion of the first photoresist layer is formed on a part of the pads of the data lines.
10. The method of claim 9 , wherein the second portion of the first photoresist layer is formed on a part of the pads of the gate lines.
11. The method of claim 1 , wherein the first preliminary contact hole is expanded toward any one of the directions in the forming of the first contact hole by expanding the first preliminary contact hole and the opening portion.
12. The method of claim 1 , wherein the removing of the second portion of the first photoresist layer includes an ashing process.
13. The method of claim 1 , wherein the pixel electrodes are formed of a transparent conductive material such as IZO or ITO.
14. The method of claim 1 , wherein the forming of the semiconductor layers, the data lines, and the drain electrodes includes:
sequentially depositing a gate insulating layer, an intrinsic amorphous silicon layer, an impurity amorphous silicon layer, and a data conductive layer on the gate lines;
forming the second photoresist layer having a different thickness based on the locations thereof on the data conductive layer; and
forming the semiconductor layers, the data lines, and the drain electrodes by selectively etching the data conductive layer, the impurity amorphous silicon layer, and the intrinsic amorphous silicon layer by using the second photoresist layer as a mask.