Method for manufacturing a shielded pole magnetic head for perpendicular recording
View Patent ↗A method of making a perpendicular magnetic recording head for use in a data storage device includes forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section. The first pole layer, second pole layer, third pole layer, and shield layer are formed without using a chemical mechanical polishing process. The method next includes concurrently trimming the shield layer and a write pole that is defined by the third pole layer to a predetermined track width. In the trimming step, the shield layer is used as a mask for the write pole.
1. A method of making a perpendicular magnetic recording head for use in a data storage device, comprising:
forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section, without using a chemical mechanical polishing process; and
then concurrently trimming the shield layer and a write pole that is defined by the third pole layer, to a predetermined track width, wherein the shield layer is used as a mask for the write pole.
2. The method of claim 1 , wherein the write pole tip has a generally trapezoidally shaped section.
3. The method of claim 2 , wherein the trapezoidally shaped section of the write pole tip has a long base and a short base.
4. The method of claim 3 , wherein the long base of the trapezoidally shaped section of the write pole tip is disposed in closer proximity to the shield layer than the short base.
5. The method of claim 4 , wherein the long base of the trapezoidally shaped section of the write pole tip defines the track width.
6. The method of claim 1 , wherein the shield layer includes a lower section and an upper section;
wherein the lower section has a generally uniform width along its entire length; and
wherein the upper section is wider than the lower section.
7. The method of claim 6 , wherein the upper section has a generally uniform width along its entire length.
8. A method of making a perpendicular magnetic recording head for use in a data storage device, comprising:
forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section, without using a chemical mechanical polishing process;
concurrently trimming the shield layer and a write pole that is defined by the third pole layer, to a predetermined track width, wherein the lower portion of the shield layer is used as a mask for the write pole;
depositing a high moment material atop a write gap formed between the lower portion of the shield layer and the third pole layer; and
forming an upper portion of the shield layer.
9. The method of claim 8 , wherein the write pole tip has a generally trapezoidally shaped section.
10. The method of claim 9 , wherein the trapezoidally shaped section of the write pole tip has a long base and a short base.
11. The method of claim 10 , wherein the long base of the trapezoidally shaped section of the write pole tip is disposed in closer proximity to the shield layer than the short base.
12. The method of claim 11 , wherein the long base of the trapezoidally shaped section of the write pole tip defines the track width.
13. The method of claim 8 , wherein the shield layer includes a lower section and an upper section;
wherein the lower section has a generally uniform width along its entire length; and
wherein the upper section is wider than the lower section.
14. The method of claim 13 , wherein the upper section has a generally uniform width along its entire length.