Method of manufacturing semiconductor device
View Patent ↗In a method of manufacturing a semiconductor device, a passivation film made of a polyimide resin film is formed on a front surface of a semiconductor wafer including a scribe line and an outer circumferential portion. Thereafter, only the passivation film which is formed on the scribe line of the semiconductor wafer and on the outer circumferential portion of the semiconductor wafer is selectively removed. A protective tape is then bonded onto the front surface of the semiconductor wafer, followed by grinding of a rear surface of the semiconductor wafer.
1. A method of manufacturing a semiconductor device, comprising the steps of:
providing a semiconductor wafer having a first main surface, a second main surface opposite the first main surface, an outer circumferential portion, and a plurality of individual semiconductor chips separated by a plurality of scribe lines and arranged on the first main surface;
forming a passivation film made of a polyimide resin film on the outer circumferential portion and on the first main surface of the semiconductor wafer so as to cover the semiconductor chips and the scribe lines;
selectively removing the passivation film from the scribe lines and from the outer circumferential portion of the semiconductor wafer but not from the semiconductor chips arranged on the first main surface of the semiconductor wafer;
bonding a protective tape onto the first main surface of the semiconductor wafer after the removing step; and
grinding the second main surface of the semiconductor wafer after the bonding step.
2. A method of manufacturing a semiconductor device according to claim 1 ; wherein the step of selectively removing the passivation film comprises a step of determining a region from which the passivation film is removed by proximity exposure.
3. A method of manufacturing a semiconductor device according to claim 1 ; further comprising a defective chip disposed on the outer circumferential portion of the semiconductor wafer and on which the passivation film is formed during the forming step; and wherein the step of selectively removing the passivation film further comprises a step of selectively removing the passivation film from the defective chip.
4. A method of manufacturing a semiconductor device according to claim 1 ; wherein the outer circumferential portion of the semiconductor wafer has a width of 1 to 2 mm.
5. A method of manufacturing a semiconductor device according to claim 1 ; wherein the polyimide resin film comprises a photosensitive polyimide resin film.
6. A method of manufacturing a semiconductor device according to claim 1 ; wherein the polyimide resin film comprises a non-photosensitive polyimide resin film.
7. A method of manufacturing a semiconductor device, comprising the steps of:
providing a semiconductor wafer having a front surface bounded by an outer circumferential portion and formed with a plurality of scribe lines separating a plurality of semiconductor chips arranged on the front surface;
forming a protective film on the outer circumferential portion and on the entire front surface of the semiconductor wafer including the scribe lines and the semiconductor chips;
selectively removing the protective film from the outer circumferential portion and the scribe lines of the semiconductor wafer but not from the semiconductor chips arranged on the front surface of the semiconductor wafer;
bonding a protective tape onto the front surface of the semiconductor wafer; and
grinding a rear surface of the semiconductor wafer opposite the front surface thereof.
8. A method of manufacturing a semiconductor device according to claim 7 ; wherein the step of selectively removing the protective film comprises a step of determining a region from which the protective film is removed by proximity exposure.
9. A method of manufacturing a semiconductor device according to claim 7 ; further comprising a defective chip disposed on the outer circumferential portion of the semiconductor wafer and on which the protective film is formed during the forming step; and wherein the step of selectively removing the protective film further comprises a step of selectively removing the protective film from the defective chip.
10. A method of manufacturing a semiconductor device according to claim 7 ; wherein the outer circumferential portion of the semiconductor wafer has a width of 1 to 2 mm.
11. A method of manufacturing a semiconductor device according to claim 7 ; wherein the protective film comprises a polyimide resin film.
12. A method of manufacturing a semiconductor device according to claim 11 ; wherein the polyimide resin film comprises a photosensitive polyimide resin film.
13. A method of manufacturing a semiconductor device according to claim 11 ; wherein the polyimide resin film comprises a non-photosensitive polyimide resin film.
14. A method of manufacturing a semiconductor device according to claim 7 ; wherein the bonding step comprises bonding the protective tape to the outer circumferential portion of the semiconductor wafer.
15. A method of manufacturing a semiconductor device according to claim 1 ; wherein the bonding step comprises bonding the protective tape to the outer circumferential portion of the semiconductor wafer.