Method of manufacturing a flexible circuit electrode array
Polymer materials form electrode array bodies for neural stimulation, especially for retinal stimulation to create vision. The method lays down a polymer layer. Apply a metal layer to the polymer and pattern to create electrodes and leads. Apply a second polymer layer over the metal layer and pattern to leave openings for electrodes. The array and its supply cable are a single body. A method for manufacturing a flexible circuit electrode array, is: deposit a metal trace layer on an insulator polymer base layer; apply a layer of photoresist on the metal trace layer and pattern the metal trace layer and form metal traces on the insulator polymer base layer; activate the insulator polymer base layer and deposit a top insulator polymer layer and form a single insulating polymer layer with the base insulator polymer layer; wherein the insulator polymer layers are heated at 80-150° C. and then at 230-350° C.
1. A method for manufacturing a flexible circuit electrode array, comprising the steps of:
depositing a metal trace layer on an insulator polymer base layer having a surface;
applying a photoresist layer on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer;
activating said insulator polymer base layer and depositing a top insulator polymer layer and forming an insulating polymer layer with said insulator polymer base layer; heating said insulator polymer base layer at between 80-150° C. and then between 230-350° C.; wherein
activating said insulator polymer base layer by etching said surface of said insulator polymer base layer by reactive ion etching and deimidizing said surface of said insulator polymer base layer.
2. A method for manufacturing a flexible circuit electrode array, comprising the steps of:
depositing a metal trace layer on an insulator polymer base layer having a surface;
applying a photoresist layer on said metal trace layer and patterning said metal trace layer and forming metal traces on said insulator polymer base layer;
activating said insulator polymer base layer and depositing a top insulator polymer layer and forming an insulating polymer layer with said insulator polymer base layer; heating said insulator polymer layer at between 80-150° C. and then between 230-350° C.; wherein
deimidizing said surface of said insulator polymer base layer by sequential treatments with KOH and HCl.