Semiconductor laser device
View Patent ↗A semiconductor laser device having a waveguide constructed in a stack of layers including, on a substrate that is transparent and has a refractive index n s for laser light, a first clad layer of a refractive index n c1 , a second clad layer of a refractive index n c2 , a third clad layer of a refractive index n c3 , a first conductivity type guide layer of a refractive index n g , an active quantum well layer, a second conductivity type guide layer, a second conductivity type clad layer, and a second conductivity type contact layer deposited in that order, wherein the waveguide has an effective refractive index n e , and the relationship n c2 <(n c1 , n c3 )<n e <(n s , n g ) is satisfied.
1. A nitride semiconductor laser device having a waveguide constructed in a stack of layers including, a first conductivity type clad layer, a first conductivity type guide layer of a refractive index n g , an active quantum well layer, a second conductivity type guide layer, and a second conductivity type clad layer deposited in this order on a substrate of GaN or AlGaN with an Al composition ratio of less than 0.02 and having a refractive index n s for laser light, wherein:
said optical waveguide has an effective refractive index n e <n s , n g , said first conductivity type clad layer includes a first region, a second region, and a third region in this order in its thickness direction, said second region having an Al composition ratio larger than said first and third regions, and then said first, second and third regions all having their respective refractive indexes smaller than n e , and
said first region has a thickness of d c1 , said second region has a thickness of d c2 and said third region has a thickness of d c3 , and then d c2 <d c1 , d c3 <d c1 and 1.4 μm≦d c1 +d c2 +d c3 ≦4.5 μm are satisfied.
2. The nitride semiconductor laser device of claim 1 , wherein in said second region, a maximum Al composition ratio X max is in a range of 0.06≦X max ≦0.35.
3. The nitride semiconductor laser device of claim 1 , wherein a portion having the maximum Al composition ratio X max in said second region in said first conductivity type clad layer of a thickness d t is located at a position farther than 2d t /3 in a direction from said substrate toward said active layer.
4. The semiconductor laser device of claim 1 , wherein on a laser beam emitting end surface, one of an optical absorber film and an optical reflective film is formed on an optical radiation region below said first conductivity type clad layer.
5. The semiconductor laser device of claim 4 , wherein said optical absorber film or said optical reflective film is formed on at least 35% area of said optical radiation region.
6. The semiconductor laser device of claim 4 , wherein in said optical radiation region, said optical absorber film or said optical reflective film is formed on a portion of at least 65% of an area located below said waveguide.
7. The semiconductor laser device of claim 4 , wherein said optical reflective film has an optical transmittance of at most 50%.