Method of producing pagewidth printhead structures in-situ
View Patent ↗A method of producing a pagewidth inkjet printhead to have structures of a plurality of nozzle openings defined through a single surface layer is provided In the method, the structures are formed in-situ on a substrate having heater elements for heating ink so that the surface layer has a thickness of ten microns or less and so that each nozzle opening is defined as a hole through the surface layer in association with at least one of the heater elements, and the structures are arranged to extend across a pagewidth. The nozzle openings are formed so that gas bubbles in the ink formed by the heating causes ejection of drops of the ink through the nozzle openings in a predetermined direction with respect to the pagewidth.
1. A method of producing a pagewidth inkjet printhead, the method comprising:
forming a substrate having defined therein a nozzle chamber operable to receive and store a fluid, the chamber fed at one side by an inlet passage;
forming a nozzle plate in-situ on the substrate to define a nozzle opening on an opposite side of the nozzle chamber to the inlet passage, the structure having a thickness of substantially 2 microns to 2.5 microns;
forming a heater element between the nozzle opening and the inlet passage, the heater element having two planar opposite sides, the heater element arranged to be in direct contact with the fluid in the nozzle chamber at the two planar opposite sides; and
arranging the structures to extend across a pagewidth.
2. The method of claim 1 wherein the nozzle plate is configured to support the fluid adjacent each nozzle opening.
3. The method of claim 1 wherein the nozzle plate is formed by chemical vapor deposition.
4. The method of claim 3 wherein the chemical vapor deposition is of silicon nitride.
5. The method of claim 3 wherein the chemical vapor deposition is of silicon dioxide.
6. The method of claim 3 wherein the chemical vapor deposition is of oxi-nitride.
7. The method of claim 1 wherein the heater element is formed as a suspended beam cantilever suspended within the fluid of the nozzle chamber at one end by the nozzle chamber.
8. The method of claim 1 wherein the heater element is configured such that said gas bubble formed by that heater element is formed at both planar opposite sides.
9. The method of claim 1 , wherein the substrate comprises a plurality of nozzle chambers each corresponding to a respective nozzle opening, a plurality of said heater elements being disposed within each nozzle chamber so that the heater elements within each chamber are formed on different respective layers.
10. The method of claim 1 wherein each heater element is formed of solid material more than 90% of which, by atomic proportion, is constituted by at least one periodic element having an atomic number below 50.
11. The method of claim 1 wherein each heater element is substantially covered by a conformal protective coating, the coating of each heater element having been applied substantially to all sides of the heater element simultaneously such that the coating is seamless.
12. The method of claim 1 wherein the nozzle chamber and nozzle opening are formed such that one nozzle chamber corresponds with one nozzle opening.
13. The method of claim 1 , wherein the heater element is formed with one planar side facing the nozzle opening.