Semiconductor laser manufacturing method
View Patent ↗A method for manufacturing a semiconductor laser. As a preparative step for coating an end face of a resonator with a dielectric film, a cleavage plane of a semiconductor laminated structure that is to be the end face is subjected to a plasma cleaning to prevent a conductive film, which absorbs laser light, from attaching to the cleavage plane. During the plasma cleaning, a first process gas containing argon gas and nitrogen gas is introduced into a vacuumed ECR sputtering apparatus. After the cleavage plane is exposed to the first process gas in the plasma state for a certain time period without application of a voltage, a second process gas containing argon gas and oxygen gas is introduced, and the cleavage plane is exposed to the second process gas in the plasma state while a voltage is applied to the silicon target.
1. A semiconductor laser manufacturing method for manufacturing a semiconductor laser by forming a dielectric film on a semiconductor laminated structure using a sputtering apparatus, the method comprising:
a first step of placing the semiconductor laminated structure in the sputtering apparatus;
a second step of introducing a first process gas containing a first reactive gas and an inert gas into the sputtering apparatus, and then putting the first process gas into a plasma state; and
a third step of exposing a target material and a predetermined portion of the semiconductor laminated structure to the first process gas in the plasma state while no voltage is applied to the target material, causing a reaction of the target material and the first reactive gas to form an insulative material so that a film of the insulative material is formed on the predetermined portion of the semiconductor laminated structure;
a fourth step of, after the third step, introducing a second process gas containing a second reactive gas and an inert gas into the sputtering apparatus, and then putting the process gas into a plasma state, and putting the second process gas into a plasma state; and
a fifth step of exposing the target material and the predetermined portion of the semiconductor laminated structure, on which the insulative material film is formed, to the second process gas in the plasma state while a voltage is applied to the target material, causing a reaction of the target material and the second reactive gas to form a dielectric material so that a film of the dielectric material is formed on the insulative material film at the predetermined portion of the semiconductor laminated structure.
2. The semiconductor laser manufacturing method of claim 1 , wherein the first reactive gas and the second reactive gas are a same gas.