Ejection inspection device, liquid droplet ejection apparatus, method of manufacturing electro-optic device, electro-optic device, and electronic apparatus

1. An ejection inspection device provided in a liquid droplet ejection apparatus having an imaging device which drives a functional liquid droplet ejection head to eject functional liquid so as to perform an imaging process on a workpiece while relatively moving the functional liquid droplet ejection head, the ejection inspection device being used to inspect ejection failures of the functional liquid droplet ejection head and comprising:

an inspection sheet which is formed in a strip shape and receives an inspecting ejection from the functional liquid droplet ejection head;

an inspection stage on which the inspection sheet is sucked and mounted and which communicates with a vacuum suction unit for sucking the inspection sheet and with an air supply unit for floating the inspection sheet;

a sheet feeding mechanism which is disposed on one end side of the inspection stage and feeds the inspection sheet wound in a roll form onto the inspection stage;

a sheet taking-up mechanism which is disposed on the other end side of the inspection stage and takes up the fed inspection sheet from the inspection stage;

a suction air valve unit which is interposed between the inspection stage and the vacuum suction unit and controls the suction air of the inspection stage;

a floating air valve unit which is interposed between the inspection stage and the air supply unit and controls the floating air of the inspection stage; and

a control unit which controls the suction air valve unit, the floating air valve unit, the sheet feeding mechanism, and the sheet taking-up mechanism, wherein

the control unit floats the inspection sheet for performing the feeding operation of the inspection sheet and the taking-up operation thereof and alternately sucks the inspection sheet first from the other end side of the inspection stage and then from the one end side of the inspection stage.

2. The ejection inspection device according to claim 1 , wherein the inspection stage includes:

a porous plate on which the inspection sheet is sucked and mounted;

a frame on which the porous plate is horizontally held;

an air chamber which is formed inside the frame facing the bottom surface of the porous plate and communicates with the vacuum suction unit and the air supply unit.

3. The ejection inspection device according to claim 2 , wherein

the frame and the porous plate are conductive.

4. The ejection inspection device according to claim 1 , wherein

the sheet feeding mechanism and the sheet taking-up mechanism each have a driving source, and

the control unit simultaneously drives the sheet feeding mechanism and the sheet taking-up mechanism to perform the feeding operation and the taking-up operation.

5. The ejection inspection device according to claim 1 , wherein

the inspection stage is composed of a plurality of divided stages divided into the extending direction of the inspection sheet,

the suction air valve unit is configured to be capable of individually controlling the suction air of the plurality of divided stages, and

the floating air valve unit is configured to be capable of individually controlling the floating air of the plurality of divided stages.

6. The ejection inspection device according to claim 5 , wherein

the control unit controls the suction air valve unit for sucking the inspection sheet and makes the plurality of divided stages perform a sucking operation alternately from the divided stage positioned at one end to that positioned at the other end.

7. The ejection inspection device according to claim 6 , wherein, for sucking the inspection sheet,

the control unit drives the sheet feeding mechanism slightly in the reverse-feed direction so as to give a tension to the inspection sheet when the sheet feeding mechanism is positioned on the other end side, and

drives the sheet taking-up mechanism slightly in the forward-feed direction so as to give a tension to the inspection sheet when the sheet taking-up mechanism is positioned on the other end side.

8. The ejection inspection device according to claim 5 , wherein

the control unit controls the suction air valve unit for sucking the inspection sheet and makes the plurality of divided stages perform a sucking operation alternately from the divided stage positioned at the intermediate part to those positioned at both ends.

9. The ejection inspection device according to claim 8 , wherein, for sucking the inspection sheet,

the control unit drives the sheet feeding mechanism slightly in the reverse-feed direction and drives the sheet taking-up mechanism slightly in the forward-feed direction so as to give a tension to the inspection sheet.

10. The ejection inspection device according to claim 5 , wherein

a divided air chamber of the respective divided stages is composed of a plurality of segmentalized air chambers,

the plurality of segmentalized air chambers are each connected with a suction air passage communicating with the suction air valve unit and a floating air passage communicating with the floating air valve unit,

the suction air valve unit is configured to be capable of individually controlling the suction air of the plurality of segmentalized air chambers, and

the floating air valve unit is configured to be capable of individually controlling the floating air of the plurality of segmentalized air chambers.

11. The ejection inspection device according to claim 1 , wherein the control unit drives the sheet taking-up mechanism slightly in the forward-feed direction so as to give a tension to the inspection sheet.

12. An ejection inspection device provided in a liquid droplet ejection apparatus having an imaging device which drives a functional liquid droplet ejection head to eject functional liquid so as to perform an imaging process on a workpiece while relatively moving the functional liquid droplet ejection head, the ejection inspection device being used to inspect ejection failures of the functional liquid droplet ejection head and comprising:

an inspection sheet which is formed in a strip shape and receives an inspecting ejection from the functional liquid droplet ejection head;

an inspection stage on which the inspection sheet is sucked and mounted and which communicates with a vacuum suction unit for sucking the inspection sheet and with an air supply unit for floating the inspection sheet;

a sheet feeding mechanism which is disposed on one end side of the inspection stage and feeds the inspection sheet wound in a roll form onto the inspection stage;

a sheet taking-up mechanism which is disposed on the other end side of the inspection stage and takes up the fed inspection sheet from the inspection stage;

a suction air valve unit which is interposed between the inspection stage and the vacuum suction unit and controls the suction air of the inspection stage;

a floating air valve unit which is interposed between the inspection stage and the air supply unit and controls the floating air of the inspection stage; and

a control unit which controls the suction air valve unit, the floating air valve unit, the sheet feeding mechanism, and the sheet taking-up mechanism, wherein

the control unit floats the inspection sheet for performing the feeding operation of the inspection sheet and the taking-up operation thereof and alternately sucks the inspection sheet first from the one end side of the inspection stage and then from the other end side of the inspection stage.

13. The ejection inspection device according to claim 12 , wherein the control unit drives the sheet taking-up mechanism slightly in the forward-feed direction so as to give a tension to the inspection sheet.

14. An ejection inspection device provided in a liquid droplet ejection apparatus having an imaging device which drives a functional liquid droplet ejection head to eject functional liquid so as to perform an imaging process on a workpiece while relatively moving the functional liquid droplet ejection head, the ejection inspection device being used to inspect ejection failures of the functional liquid droplet ejection head and comprising:

an inspection sheet which is formed in a strip shape and receives an inspecting ejection from the functional liquid droplet ejection head;

an inspection stage on which the inspection sheet is sucked and mounted and which communicates with a vacuum suction unit for sucking the inspection sheet and with an air supply unit for floating the inspection sheet;

a sheet feeding mechanism which is disposed on one end side of the inspection stage and feeds the inspection sheet wound in a roll form onto the inspection stage;

a sheet taking-up mechanism which is disposed on the other end side of the inspection stage and takes up the fed inspection sheet from the inspection stage;

a suction air valve unit which is interposed between the inspection stage and the vacuum suction unit and controls the suction air of the inspection stage;

a floating air valve unit which is interposed between the inspection stage and the air supply unit and controls the floating air of the inspection stage; and

a control unit which controls the suction air valve unit, the floating air valve unit, the sheet feeding mechanism, and the sheet taking-up mechanism, wherein

the control unit floats the inspection sheet for performing the feeding operation of the inspection sheet and the taking-up operation thereof and alternately sucks the inspection sheet first from an intermediate part of the inspection stage and then from both the one end and the other end of the inspection stage while driving the sheet feeding mechanism slightly in the reverse-feed direction and driving the sheet taking-up mechanism slightly in the forward-feed direction so as to give a tension to the inspection sheet.