Transporting machine
A transporting arm has two protruding support sections. Front ends of the support sections are formed such that a thickness of the support sections decreases toward the front ends of those. A surface of the transporting arm on which a wafer is placed is provided with a plurality of suction holes formed at equal intervals in a fan-shaped region. The wafer is fixed to the transporting arm through the suction holes. The wafer is charged with a large amount of static electricity. The transporting arm is charged with the static electricity. A surface of the transporting arm is coated with a conductive fluorinated graphite material. Therefore, an electrical discharge rate of the transporting arm into an atmosphere increases. Accordingly, elevation of a surface potential of the transporting arm in a floating state can be appropriately suppressed. Reduction of repulsive force due to the static electricity acting between the transporting arm and the wafer leads to reduction of vibration of the wafer.
1. An apparatus for transporting a thin plate-like wafer, comprising:
a base section formed from a base material, the base section comprising:
a plurality of suction holes for sucking and fixing the wafer arranged in an arc shape at a first end of the base section; and
a coating substance that coats the base section, wherein the coating substance is selected for coating based on being located on a negative side in the triboelectric series relative to a location of the base material in the triboelectric series;
a first support section extending from the first end of the base section; and
a second support section extending from the first end of the base section and comprising an end portion remote from the base section having a thickness that decreases toward a tip on the end of the second support section,
wherein the first support section comprises a length that is longer than a length of the second support section.
2. The apparatus of claim 1 , wherein the base material comprises a metal and the coating substance comprises a fluorinated graphite material.
3. The apparatus of claim 1 , wherein the plurality of suction holes are arranged at equal intervals.
4. The apparatus of claim 1 , wherein the plurality of suction holes are arranged in an arc shape that arcs towards the first end of the base section.
5. The apparatus of claim 1 , wherein the first support section comprises an end portion remote from the base section, the end portion comprising a thickness that decreases toward a tip of the end portion of the first support section.