IP Library Granted Patent US 7,616,904
Granted Patent B1
US 7,616,904 · App. 11/710,162 · Granted Nov 10, 2009

Waveguide photodetector with integrated electronics

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Quick Facts
Patent No.
US 7,616,904
App. No.
11/710,162
Granted
Nov 10, 2009
Kind
B1
Abstract

A germanium on silicon waveguide photodetector disposed on a silicon on insulator (SOI) substrate. The photodetector is incorporated into a section of a planar silicon waveguide on the substrate. The photodetector generates an electric current as an infrared optical signal travels through the photodetector.

Claims (66)

1. A method for communicating signals to a semiconductor device using optical signals comprising:

sending an optical signal to an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for conducting light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the second plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

2. A method for communicating signals to a semiconductor device using optical signals comprising:

receiving an optical signal at an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for conducting light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the second plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

3. A method for communicating signals to a semiconductor device using optical signals comprising:

sending an optical signal to an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for conducting light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the first plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

4. A method for communicating signals to a semiconductor device using optical signals comprising:

receiving an optical signal at an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for conducting light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the first plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

5. A method for communicating signals to a semiconductor device using optical signals comprising:

sending an optical signal to an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for absorbing light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the second plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

6. A method for communicating signals to a semiconductor device using optical signals comprising:

receiving an optical signal at an input of a germanium on silicon waveguide photodetector located on a semiconductor chip, said germanium on silicon waveguide photodetector comprising:

a waveguide comprising:

a core comprised of a germanium on silicon heterojunction stack comprising:

a silicon layer comprising substantially silicon for conducting light, and

a germanium layer comprising substantially germanium for absorbing light; and

a cladding comprised of a plurality of dielectric materials;

an optical input;

a first plurality of conductive contacts coupled to said germanium layer; and

a second plurality of conductive contacts coupled to said silicon layer; and,

outputting an electrical signal through at least one of the second plurality of conductive contacts of the germanium on silicon waveguide photodetector to an input of a semiconductor device located on the semiconductor chip.

Assignments (7)
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNOR'S NAME PREVIOUSLY RECORDED AT REEL: 058979 FRAME: 0027. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Mar 24, 2022
From: LUXTERA LLC
To: CISCO TECHNOLOGY, INC.
Reel/Frame 059496/0803 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2022
From: CISCO SYSTEMS, INC.
To: CISCO TECHNOLOGY, INC.
Reel/Frame 058979/0027 →
RELEASE OF SECURITY INTEREST Recorded Dec 24, 2020
From: SILICON VALLEY BANK
To: LUXTERA, LLC
Reel/Frame 054855/0838 →
CHANGE OF NAME Recorded Feb 6, 2020
From: LUXTERA, INC.
To: LUXTERA LLC
Reel/Frame 052019/0811 →
SECURITY INTEREST Recorded Mar 29, 2017
From: LUXTERA, INC.
To: SILICON VALLEY BANK
Reel/Frame 042109/0140 →
SECURITY AGREEMENT Recorded Mar 17, 2010
From: LUXTERA, INC.
To: SILICON VALLEY BANK
Reel/Frame 024091/0191 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 4, 2007
From: GUNN III, LAWRENCE C.; PINGUET, THIERRY J.; RATTIER, MAXIME JEAN; CAPELLINI, GIOVANNI
To: LUXTERA, INC.
Reel/Frame 019170/0671 →