Mold for nano-imprinting and method of manufacturing the same
View Patent ↗A nano-imprint mold and a method of manufacturing the same are provided, which can be used for replicating a nano-scaled structure to a polymer layer. The nano-imprint mold comprises: a substrate; a pattern portion having a prominence and depression pattern formed on the substrate; a hard layer formed of a material with a hardness higher than the pattern portion on a surface of the pattern portion; and a separation layer formed on a surface of the hard layer. In the nano-imprint mold of the present invention, an original pattern can be uniformly replicated even on a substrate with an irregular surface. Further, the pattern can be prevented from being damaged by pressure and being contaminated by synthetic resin, resulting in better accuracy and durability of the pattern.
1. A nano-imprint mold comprising:
a substrate;
a pattern portion having a prominence and depression pattern formed on the substrate;
a hard layer formed of a material with a hardness higher than the pattern portion on a surface of the pattern portion; and
a separation layer formed on a surface of the hard layer,
wherein the substrate is formed of a material through which ultraviolet ray is permeable;
wherein the pattern portion has the prominence and depression pattern formed on a buffer layer covering an entire surface of the substrate, the buffer layer of the pattern portion and the prominence and depression pattern integrated therewith are made of an identical material, the buffer layer has a thickness less than 1 mm, and said thickness is at least twenty times more than that of the prominence and depression pattern; and
wherein the separation layer is formed of a Self Assembled Monolayer (SAM) based on organosilicon group.
2. The nano-imprint mold as claimed in claim 1 , wherein the pattern portion is formed of a material of an ultraviolet cured polymer.
3. The nano-imprint mold as claimed in claim 1 , wherein the hard layer is formed of a material selected from at least one of a silicon oxide and Indium Tin Oxide (ITO).
4. The nano-imprint mold as claimed in claim 1 , wherein the hard layer is formed of a material selected from at least one of Aluminum (Al), Chrome (Cr), Tantalum (Ta), or Nickel (Ni).