IP Library Granted Patent US 7,497,110
Granted Patent B2
US 7,497,110 · App. 11/712,135 · Granted Mar 3, 2009

Methods and apparatus for test gas leak detection

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Quick Facts
Patent No.
US 7,497,110
App. No.
11/712,135
Granted
Mar 3, 2009
Kind
B2
Abstract

A leak detector includes a leak detector inlet to receive a test gas, a vacuum pump coupled to the leak detector inlet, a test gas sensing unit connected through a passage to the leak detector inlet, to sense the test gas, a membrane that is permeable to the test gas, the membrane disposed in the passage between the leak detector inlet and the test gas sensing unit, and a control mechanism to substantially terminate transmission of the test gas through the membrane in a time of 500 milliseconds or less. In other embodiments, the control mechanism substantially terminates transmission of the test gas through the membrane in a time of 100 milliseconds or less.

Claims (27)

1. A leak detector comprising:

a leak detector inlet to receive a test gas;

a vacuum pump coupled to the leak detector inlet;

a test gas sensing unit connected through a passage to the leak detector inlet to sense the test gas;

a membrane that is permeable to the test gas, the membrane being disposed in the passage between the leak detector inlet and the test gas sensing unit; and

a control mechanism to substantially terminate transmission of the test gas through the membrane in a time of five hundred milliseconds or less.

2. The leak detector as defined in claim 1 , wherein the membrane has an operating temperature from ambient temperature to about 100° C.

3. The leak detector as defined in claim 1 , wherein the control mechanism comprises:

a first valve coupled between the leak detector inlet and the membrane, a trapped volume being defined between the first valve and the membrane;

a second valve coupled to the trapped volume; and

a controller to open the first valve and close the second valve in a first mode and to open the second valve and close the first valve upon switching to a second mode, wherein the vacuum pump comprises a dual inlet vacuum pump having a first inlet coupled to the leak detector inlet and a second inlet coupled through the second valve to the trapped volume.

4. The leak detector as defined in claim 1 , wherein the control mechanism comprises a valve disposed between the leak detector inlet and the test gas sensing unit, the valve including a housing and a valve closure member movable between a closed position in contact with the membrane and an open position retracted from the membrane.

5. The leak detector as defined in claim 4 , wherein the valve comprises a solenoid valve.

6. The leak detector as defined in claim 4 , wherein the membrane is incorporated into a valve housing.

7. The leak detector as defined in claim 4 , wherein the valve member includes an elastomer portion that contacts the closure membrane.

8. The leak detector as defined in claim 1 , wherein the control mechanism is configured to substantially terminate transmission of the test gas through the membrane in a time of one hundred milliseconds or less.

9. The leak detector as defined in claim 1 , wherein the control mechanism is configured to substantially terminate transmission of the test gas through the membrane in a time of twenty five milliseconds or less.

10. The leak detector as defined in claim 1 , wherein the membrane has a permeance to the test gas that varies by less than five percent over a temperature range of T 0 −20K to T 0 +20K, where T 0 is a nominal operating temperature.

11. The leak detector as defined in claim 10 , wherein the nominal operating temperature T 0 is 300K.

12. A method for leak detection, comprising:

passing a test gas through a membrane disposed in a passage between a leak detector inlet and a test gas sensing unit, and sensing the test gas with the test gas sensing unit; and

substantially terminating transmission of the test gas through the membrane in a time of five hundred milliseconds or less.

13. The method for leak detection as defined in claim 12 , wherein substantially terminating transmission of the test gas through the membrane comprises rapidly vacuum pumping a trapped volume on an inlet side of the membrane upon switching from a first mode to a second mode.

14. The method for leak detection as define in claim 12 , wherein substantially terminating transmission of the test gas through the membrane comprises moving a valve closure member into contact with the membrane upon switching from a first mode to a second mode.

15. The method for leak detection as defined in claim 12 , further comprising operating the membrane at a temperature from ambient temperature to about 100° C.

16. The method for leak detection as defined in claim 11 , wherein substantially terminating transmission of the test gas through the membrane comprises substantially terminating transmission of the test gas through the membrane in a time of one hundred milliseconds or less.

17. The method for leak detection as defined in claim 11 , wherein substantially terminating transmission of the test gas through the membrane comprises substantially terminating transmission of the test gas through the membrane in a time of twenty five milliseconds or less.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 17, 2010
From: VARIAN, INC.
To: AGILENT TECHNOLOGIES, INC.
Reel/Frame 025368/0230 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 15, 2007
From: LIEPERT, ANTHONY G.
To: VARIAN, INC.
Reel/Frame 019029/0936 →