Plasma display panel and manufacturing method thereof
View Patent ↗A plasma display panel includes a substrate, a plurality of metal electrodes, and a dielectric layer. The plurality of metal electrodes are formed on the substrate in a predetermined direction. The dielectric layer is formed on the metal electrodes by firing a glass material. The metal electrodes are formed with a film thickness of 6 μm or less. The dielectric layer is formed with a film thickness of 25 μm or less.
1. A method of manufacturing a plasma display panel that includes forming a plurality of metal electrodes on a substrate in a predetermined direction and forming a first and second dielectric layers on the metal electrodes by firing a glass material, the method comprising:
forming the metal electrodes with a film thickness of 4 μm or less, the metal electrodes having a three-layer structure of Cr—Cu—Cr in which a first Cr layer is formed on the substrate, a Cu layer is formed on the first Cr layer, and a second Cr layer is formed on the Cu layer, the Cu layer having a film thickness of 3 μm to 4 μm and each of the first Cr layer and the second Cr layers having a thickness of 500 Å to 2000 Å;
placing a first glass material on the substrate, including the metal electrodes;
firing the first glass material at a temperature of higher than 600 degrees Celsius and lower or equal to 610 degrees Celsius so that the first dielectric layer is formed having a film thickness of 5 μm to 10 μm;
placing a second glass material on the first dielectric layer after the first dielectric layer has been fired; and
firing the second glass material at a temperature of 550 degrees Celsius to 560 degrees Celsius so that the second dielectric layer is formed having a film thickness of 10 μm to 15 μm, wherein
the first and second dielectric layers are formed with a total film thickness of 20 μm or less by firing a glass paste including a non-lead based glass frit, a binder resin, and a solvent so that bubbles of 10 μm or more in diameter do not exist in the first and second dielectric layers.
2. The method of manufacturing a plasma display panel according to claim 1 , wherein
the non-lead-based glass frit is constituted from a glass material selected from the group consisting of B 2 O 3 —SiO 2 —ZnO-based glass, Bi 2 O 3 —B 2 O 3 —SiO 2 -based glass, B 2 O 3 —SiO 2 —Al 2 O 3 -based glass, ZnO—B 2 O 3 —SiO 2 —BaO-based glass, and any of these mixed with an alkali or alkali-earth oxide.
3. The method of manufacturing a plasma display panel according to claim 1 , wherein the metal electrodes are formed by a wet-etching process.
4. The plasma display panel according to claim 1 , wherein the first dielectric layer has a softening point that is higher than a softening point of the second dielectric layer.