Solid-state imaging device and method for driving the same
View Patent ↗A pixel array is provided in which cells are arranged in a matrix. Each cell includes a photodiode, an FD, a transfer transistor, a reset transistor, an amplifying transistor having a gate electrode connected to the FD, a drain connected to a power supply line, and a source connected to a vertical signal line, and an FD wire. The FD wire is provided in a first wiring line, and the vertical signal line is provided in a second wiring line positioned over the first wiring layer. Since the potential of the FD wire follows the potential of the vertical signal line, it is possible to suppress a variation in capacitance occurring in the FD when a position of the vertical signal is shifted, depending on a position of the cell.
1. A solid-state imaging device comprising:
a pixel array including photodiodes for accumulating an amount of electric charges corresponding to the intensity of received light, floating diffusions to which electric charges accumulated by the photodiodes are transferred, transfer transistors for controlling transfer of electric charges from the photodiodes to the floating diffusions, and amplifying transistors having a source from which a signal corresponding to electric charges transferred to the floating diffusion is output, wherein a plurality of cells are provided in the pixel array;
a plurality of power supply lines provided over the pixel array and connected to drains of the amplifying transistors;
a plurality of vertical signal lines provided over the pixel array and connected to sources of the amplifying transistors; and
a plurality of floating diffusion wires provided over the pixel array, connecting gate electrodes of the amplifying transistors and the floating diffusions, wherein
the plurality of power supply lines and the plurality of vertical signal lines extend in a column direction,
first photodiode groups of the photodiodes are between pairs of power supply lines,
second photodiode groups of the photodiodes are between pairs of vertical signal lines,
the pairs of power supply lines and the pairs of vertical signal lines are positioned alternately, and
the plurality of power supply lines and the plurality of vertical signal lines are shifted to the center of the pixel array.
2. The solid-state imaging device of claim 1 , wherein
the plurality of power supply lines, the plurality of floating diffusion wires and the plurality of vertical signal lines are formed in a first wiring layer.
3. The solid-state imaging device of claim 1 , wherein
the pair of power supply lines are connected with each other.
4. The solid-state imaging device of claim 1 , wherein
the plurality of power supply lines is independent individually.
5. The solid-state imaging device of claim 1 , wherein
the plurality of vertical signal lines is independent individually.
6. The solid-state imaging device of claim 1 , wherein
the plurality of power supply lines has branch portions which are located between photodiodes adjacent in vertical direction.
7. The solid-state imaging device of claim 1 , wherein
the plurality of vertical signal lines has branch portions which are located between photodiodes adjacent in vertical direction.
8. The solid-state imaging device of claim 1 , further comprising:
transfer gate electrodes; and
transfer gate electrode wires, wherein
the transfer gate electrode wires extend in horizontal direction.
9. The solid-state imaging device of claim 8 , wherein
the transfer gate electrodes and the transfer gate electrode wires are formed at the same time.
10. The solid-state imaging device of claim 1 , further comprising:
reset gate electrodes; and
reset gate electrode wires, wherein
the reset gate electrode wires extend in horizontal direction.
11. The solid-state imaging device of claim 10 , wherein
the reset gate electrodes and the reset gate electrode wires are formed at the same time.
12. The solid-state imaging device of claim 1 , further comprising:
a substrate contact wire formed in a second wiring layer and between the photodiodes.
13. The solid-state imaging device of claim 12 , wherein
the substrate contact wire is located between the photodiodes in vertical direction.
14. The solid-state imaging device of claim 12 , wherein
the substrate contact wire is located between the photodiodes in horizontal direction.