Method for patterning an organic material to concurrently form an insulator and a semiconductor and device formed thereby
View Patent ↗A method for fabricating an electronic device includes forming a layer of precursor material for forming a semi-conductor material in a cured state and exposing the precursor material to light. The precursor is heated in the presence of the light to form an insulator in areas exposed to light and a semiconductor in areas not exposed to the light. The light is preferably in the visible range. Suitable precursors may include 6,13-dihydro-6,13-(2,3,4,5-tetrachloro-2,4-cyclohexadieno)-pentacene ( 202 ) to form, for example, pentacene ( 204 ) as the semiconductor and 6,13-pentacenequinone ( 206 ) as an insulator. A device made in accordance with the method is also included.
1. A method for fabricating an electronic device, comprising the steps of:
forming a layer of precursor material for forming a semiconductor material in a cured state; and
heating the precursor in the presence of light and ambient oxygen to form an insulator in areas exposed to light and a semiconductor in areas not exposed to the light, wherein the precursor is a pentacene precursor, and the pentacene precursor is patterned in the presence of light and ambient oxygen, thereby forming an oxide of pentacene without performing additional steps of depositing photoresist and applying a reactive ion etch.
2. The method as recited in claim 1 , wherein the step of heating includes exposing the precursor material to light in the visible, UV and/or IR region.
3. The method as recited in claim 2 , wherein the light includes white light having an intensity of between about 0.1 mW/cm 2 and 1 W/cm 2 .
4. The method as recited in claim 1 , wherein the step of heating includes exposing the precursor material to light and heat simultaneously using a laser.
5. The method as recited in claim 1 , wherein the step of heating the precursor includes heating the precursor to higher than 150 degrees Celsius.
6. The method as recited in claim 1 , wherein the step of heating the precursor includes heating the precursor in the presence of oxygen to form an oxide in areas exposed to the light.
7. The method as recited in claim 1 , wherein the insulator includes a quinone.
8. The method as recited in claim 7 , wherein the quinone includes 6,13-pentacenequinone, or a larger sibling material.
9. The method as recited in claim 1 , wherein the semiconductor material includes pentacene.
10. The method as recited in claim 1 , wherein the step of heating the precursor in the presence of light includes simultaneously heating and illuminating the precursor in selected regions with a light source and subsequently heating the precursor to form a semiconductor in non-illuminated regions.