Component separating device and method of separating component

1. A component separating device comprising:

a substrate;

a fluid channel provided at the substrate for containing a fluid including a liquid component and a solid component;

an actuator for generating a standing wave at inside of the fluid channel; and

a groove provided at a surrounding of the actuator,

wherein the actuator is provided on the substrate.

2. The component separating device of claim 1 ,

wherein the groove is a through hole.

3. The component separating device of claim 1 ,

wherein the fluid channel and the actuator are provided in the same axial direction.

4. The component separating device of claim 1 ,

wherein a plurality of the actuators are arranged to be opposed to each other across the fluid channel.

5. The component separating device of claim 1 ,

wherein a plurality of the actuators are arranged along the fluid channel.

6. The component separating device of claim 1 ,

wherein the fluid channel is provided at an upper face of the substrate, and the actuator is provided at a lower face of the substrate.

7. The component separating device of claim 2 ,

wherein the groove includes

a first opening portion opened to a side of forming the actuator and

a second opening portion opened to a side opposed to the first opening portion, and

the first opening portion is smaller than the second opening portion.

8. The component separating device of claim 7 ,

wherein the groove includes

a wall face connecting the first opening portion and the second opening portion, and

a sectional shape of the wall face is constituted by at least either one of a circular arc and an elliptical curve having centers thereof on a side of the groove.

9. The component separating device of claim 1 ,

wherein the actuator is provided at a lower face of the substrate and

an angle made by a wall face of the groove on a side of the fluid channel and the lower face is an acute angle.

10. The component separating device of claim 1 ,

wherein a material of the substrate is silicon.

11. The component separating device of claim 1 ,

wherein the actuator includes a lower electrode and a piezoelectric member and an upper electrode,

a material of the lower electrode includes at least either one of titanium and platinum,

a material of the piezoelectric member includes lead zirconate titanate, and

a material of the upper electrode includes at least either one of titanium and gold.

12. A method of separating a component comprising:

a fluid containing step of containing a fluid including a liquid component and a solid component in a fluid channel provided at a substrate;

a standing wave generating step of generating a standing wave having a node at an inner portion of the fluid channel by generating a vibration by applying a high frequency voltage to a plurality of actuators provided to be opposed to the fluid channel;

a reflecting step of reflecting the vibration by a groove provided at a surrounding of the actuator, and the groove is removed at the surrounding of a side of the fluid channel; and

a separating step of separating at least either one of the liquid component and the solid component from the fluid.

13. The method of separating a component of claim 12 ,

wherein the standing wave generating step is a standing wave generating step of generating a standing wave having an odd number pieces of nodes at the fluid channel by generating a vibration by applying high frequency voltages respective phases of which differ from each other by 180 degrees to a first actuator and a second actuator respectively provided on both sides of the fluid channel to be opposed to each other.

14. The method of separating a component of claim 12 ,

wherein the standing wave generating step is a standing wave generating step of generating a standing wave having an even number pieces of nodes at the fluid channel by generating a vibration by applying high frequency voltages respective phases of which are the same to a first actuator and a second actuator provided respectively on both sides of the fluid channel to be opposed to each other.

15. The method of separating a component of claim 12 ,

wherein the standing wave generating step is a standing wave generating step of generating a standing wave having an odd number pieces of nodes and a standing wave having an even number pieces of nodes at the fluid channel by generating vibrations by applying high frequency voltages having frequencies respectively different from each other to a first actuator and a third actuator respectively provided along the fluid channel.