Semiconductor integrated circuit device
View Patent ↗A nonvolatile storage element of a single-layer gate type structure is arranged so that a floating gate is formed of a conductive layer which partly overlaps with a control gate, formed of a diffused layer, and is provided with a barrier layer covering a part of or the whole surface of the floating gate. Nonvolatile storage elements characterized as such are used for redundancy control of defects or change of functions.
1. A semiconductor integrated circuit device comprising a first MISFET formed on a semiconductor substrate and representing a part of an analog circuit, a nonvolatile memory element formed on the semiconductor substrate, and a plurality of field insulating films formed in the semiconductor substrate and separating the first MISFET and nonvolatile memory element, wherein:
the first MISFET has a first gate electrode, a first drain region and a first source region,
the nonvolatile memory element has a control gate electrode, a floating gate electrode, a second drain region and a second source region,
the control gate electrode is formed in a first region of a nonvolatile memory element forming region and includes first impurity regions in the semiconductor substrate,
the second drain region and second source region are formed in a second region of the nonvolatile memory element forming region and include second impurity regions in the semiconductor substrate,
the first and second regions are separated by the field insulating films,
the floating gate electrode is formed over the first region, the field insulating films and the second region,
the floating gate electrode and the first gate electrode of the first MISFET are formed of a same layer,
the nonvolatile memory element is used for storing data of a trimming voltage used in the analog circuit, and
the storing data is performed electrically.
2. A semiconductor integrated circuit device according to the claim 1 ,
wherein the first impurity region is formed in a first well region formed in the semiconductor substrate.
3. A semiconductor integrated circuit device according to the claim 1 ,
wherein the first MISFET is a component of an operational amplifier circuit of the analog circuit.
4. A semiconductor integrated circuit device according to the claim 1 ,
wherein programming of data to the nonvolatile memory element is performed by injecting hot carriers or using FN-tunneling, and
wherein erasing of data from the nonvolatile memory element is performed by using FN-tunneling.
5. A semiconductor integrated circuit device according to the claim 1 ,
wherein the second impurity regions have an n-type conductivity.
6. A semiconductor integrated circuit device according to the claim 1 ,
wherein the trimming is carried out before encapsulating of the semiconductor integrated circuit device.
7. A semiconductor integrated circuit device according to the claim 6 ,
wherein the trimming can be carried out after encapsulating of the semiconductor integrated circuit device.
8. A semiconductor integrated circuit device according to the claim 1 , further comprising a plurality of resistor elements,
wherein the trimming is performed by changing the resistance ratio of resistor elements.