Electro-optical device and electronic apparatus
View Patent ↗An electro-optical device includes an element substrate having a plurality of pixel regions; thin-film transistors, arranged in the pixel regions, including gate electrodes, portions of a gate insulating layer, and semiconductor layers; pixel electrodes electrically connected to drain regions of the thin-film transistors; and storage capacitors including lower electrodes and upper electrodes that are opposed to the lower electrodes with insulating layers disposed therebetween, the insulating layers being made of the same material as that for forming the gate insulating layer. The upper electrodes overlap with some of end portions of the lower electrodes. The gate insulating layer has thin portions located in inner portions of regions overlapping with the lower and upper electrodes and thick portions which are located in regions overlapping with the upper electrodes and the end portions of the lower electrodes and which have a thickness greater than that of the thin portions.
1. An electro-optical device comprising:
an element substrate having a plurality of pixel regions;
thin-film transistors, arranged in the pixel regions, including gate electrodes, portions of a gate insulating layer, and semiconductor layers;
pixel electrodes electrically connected to drain regions of the thin-film transistors; and
storage capacitors including lower electrodes and upper electrodes that are opposed to the lower electrodes with insulating layers disposed therebetween, the insulating layers being made of the same material as that for forming the gate insulating layer,
wherein the upper electrodes overlap with some of end portions of the lower electrodes and the gate insulating layer has thin portions located in inner portions of regions overlapping with the lower and upper electrodes and thick portions which are located in regions overlapping with the upper electrodes and the end portions of the lower electrodes and which have a thickness greater than that of the thin portions, and
the thick portions extend inward from the end portions of the lower electrodes and have a width greater than the thickness of the thick portions.
2. The electro-optical device according to claim 1 , wherein the gate electrodes, the gate insulating layer portions, and the semiconductor layers are arranged in the thin-film transistors in that order.
3. The electro-optical device according to claim 1 , wherein the thin portions are located outside the regions overlapping with the upper electrodes and the end portions of the lower electrodes.
4. The electro-optical device according to claim 1 , wherein the gate insulating layer includes a lower gate insulating sublayer including one or more insulating layer sections and a upper gate insulating sublayer including one or more insulating layer sections, the thin portions are formed by partly removing the lower gate insulating sublayer, and the thick portions correspond to portions in which the upper gate insulating sublayer is disposed on the lower gate insulating sublayer.
5. The electro-optical device according to claim 4 , wherein the lower gate insulating sublayer includes an insulating layer section and the upper gate insulating sublayer includes an insulating layer section.
6. The electro-optical device according to claim 1 , wherein the semiconductor layers are made of amorphous silicon.