Display apparatus and method of manufacturing the same
View Patent ↗Disclosed is a display apparatus, and method of making same, including a plurality of lower electrodes patterned on a substrate on the basis of each pixel, an auxiliary wiring composed of the same layer as the lower electrodes and arranged in the state of being insulated from the lower electrodes, an insulating film formed on the substrate and provided with pixel openings for exposing central portions of the lower electrodes and connection holes reaching the auxiliary wiring, organic layers so patterned as to cover bottom portions of the pixel openings and to have end portions partly overlapping on each other between the adjacent pixels, and an upper electrode so formed as to cover the organic layers and to be connected to the auxiliary wiring through the connection holes between the organic layers.
1. A method of manufacturing a display apparatus, comprising the steps of:
patterning a conductive film on a substrate and forming a plurality of lower electrodes corresponding to respective pixels;
forming an auxiliary wiring between and insulated from said lower electrodes;
forming on said substrate an insulating film provided with (a) pixel openings exposing central portions of said lower electrodes and (b) connection holes extending to said auxiliary wiring;
forming a mask layer by vapor deposition such that the mask layer overlaps the sidewalls of the insulation layer at the periphery of the pixel openings and includes opening portions which correspond to areas where an organic layer is formed;
forming the organic layer covering bottom portions of said pixel openings and having end portions partly overlapping each other between the adjacent pixels; and
forming an upper electrode over said organic layer and connected to said auxiliary wiring through said connection holes between said organic layers,
wherein,
and
said overlapping end portions of the organic layer are positioned above the auxiliary wiring relative to said substrate in a longitudinal direction between corresponding pixels.
2. A method of manufacturing a display apparatus as set forth in claim 1 , wherein
said substrate comprises an inter-layer insulating film covering a thin film transistor substrate provided with thin film transistors which drive said pixels, and each of said lower electrodes is connected to each of said thin film transistors through a connection hole formed in said inter-layer insulating film.
3. A method of manufacturing a display apparatus as set forth in claim 1 , wherein the step of forming said organic layer is performed using vapor deposition and a mask.
4. A method of manufacturing a display apparatus as set forth in claim 1 , wherein said lower electrodes comprise a reflective metallic material layer sandwiched between conductive oxide material layers.
5. A method of manufacturing a display apparatus as set forth in claim 1 , wherein said upper electrode is light-transmitting.
6. A method of manufacturing a display apparatus as set forth in claim 1 , wherein said lower electrodes are formed of a light reflective material.
7. A method of manufacturing a display apparatus as set forth in claim 1 , wherein the upper electrode is formed by first forming a first layer on the whole surface of the substrate by co-vapor deposition and next forming a second layer on the first layer.
8. A method of manufacturing a display apparatus as set forth in claim 7 , wherein the first layer is composed of Mg—Ag.
9. A method of manufacturing a display apparatus as set forth in claim 7 , wherein the second layer is composed of In—Zn—O based transparent conductive film.