ELECTRONIC DEVICE AND METHOD FOR OPERATING A MEMORY CIRCUIT
An electronic device is disclosed having a dielectric layer ( 12 ) formed at a semiconductor substrate ( 10 ). A polysilicon fuse structure ( 14 ) having a first length is formed overlying the dielectric layer ( 12 ). First and second portions ( 141, 142 ) of the polysilicon fuse structure are silicided, wherein a third portion ( 143 ) of the polysilicon fuse structure ( 114 ) that abuts the first portion ( 141 ) and the second portion ( 142 ) of the polysilicon fuse remains unsilicided.
1 . A method of forming an electronic device comprising:
forming a dielectric layer overlying a search substrate;
forming a semiconductor structure of a fuse element overlying the dielectric layer; and
siliciding a first portion of the semiconductor structure and a second portion of the semiconductor structure, wherein a third portion of the semiconductor structure that remains unsilicided is between and abutting the first portion and the second portion.
2 . The method of claim 1 further comprising:
providing a current from the first portion to the second portion through the third portion to change a conductivity state of the fuse element from a first conductivity state to a second conductivity state during a programming operation, wherein the first conductivity is to be read as a first logic state during a read operation and the second conductivity state is to be read as a second logic state during the read operation.
3 . The method of claim 2 , wherein the first conductivity state is more conductive than the second conductivity state.
4 . The method of claim 3 , wherein providing the current further comprises providing less than 11 milliamps.
5 . The method of claim 2 , wherein the second conductivity state is less conductive than the first conductivity state.
6 . The method of claim 5 , wherein providing the current further comprises providing less than 4 milliamps.
7 . The method of claim 1 further comprising:
forming a first conductive inter-level interconnect to a location of the first portion;
forming a second conductive inter-level interconnect to a location of the second portion, wherein a location of the third portion is equal-distant from the location of the first portion and the location of the second portion.
8 . The method of claim 7 , wherein a distance from the location of the first portion to the location of the second portion is less than approximately 2 micrometers.
9 . A method comprising:
providing, during a programming operation, a current from a first silicide portion of a semiconductor structure of a fuse element to a second silicide portion of the semiconductor structure through a non-silicide portion of the semiconductor structure to elevate a temperature at a fuse link region proximate the non-silicide portion; and
changing a conductivity state of the fuse link region, in response to providing the current, from a first conductivity state to a second conductivity state, wherein the first conductivity state is to be read as a first logic state for a read operation and the second conductivity state is to be read as a second logic state for the read operation.
10 . The method of claim 9 wherein the first conductivity state is more conductive than the second conductivity state.
11 . The method of claim 9 wherein the first conductivity state is less conductive than the second conductivity state.
12 . The method of claim 9 , wherein providing the current further comprises providing the current to the semiconductor structure overlying and abutting a gate dielectric.
13 . The method of claim 9 , wherein providing the current to elevate the temperature at the fuse link region includes elevating the temperature of the fuse link region at the non-silicide portion.
14 . The method of claim 13 , wherein the first conductivity state is more conductive that the second conductivity state.
15 . The method of claim 13 wherein the first conductivity state is less conductive than the second conductivity state.
16 . The method of claim 9 , wherein providing the current to elevate the temperature at the fuse link region includes elevating the temperature of the fuse link region at a conductive inter-level interconnect.
17 . The method of claim 9 , wherein providing the current to elevate the temperature at the fuse link region includes elevating the temperature of the fuse link region at a dielectric region.
18 . A device comprising:
a substrate;
a dielectric layer;
a first length of a semiconductor structure of a fuse element, the first length being silicided, wherein the dielectric layer is between the substrate and the semiconductor structure;
a second length of the semiconductor structure that is silicided; and
a third length of the semiconductor structure between and abutting the first length and the second length that is unsilicided, the third length having a first conductivity state prior to programming and the device operable to have a second conductivity state after programming.
19 . The device of claim 18 , wherein the first length and the second length are N-doped and the third length is P-doped.
20 . The device of claim 18 , wherein the first length and the second length are P-doped and the third length is N-doped.