Microelectromechanical system having a dielectric movable membrane and a mirror

1. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising:

a flexible dielectric layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and

a reflective element having a first portion mechanically coupled to the flexible dielectric layer and a second portion spaced from the flexible dielectric layer and defining a gap therebetween.

2. The MEMS device of claim 1 , wherein the flexible dielectric layer comprises SiO 2 .

3. The MEMS device of claim 1 , wherein the reflective element comprises aluminum.

4. The MEMS device of claim 1 , wherein the reflective element comprises:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a second dielectric layer between the second reflective layer and the electrically conductive layer.

5. The MEMS device of claim 4 , wherein the communication path is disposed over an edge of the reflective element.

6. The MEMS device of claim 4 , wherein the second dielectric layer includes a notch in an edge of the second dielectric layer, at least a portion of the communication path being within the notch.

7. The MEMS device of claim 4 , wherein the second dielectric layer includes a first notch in a first edge of the second dielectric layer and a second notch in a second edge of the second dielectric layer, at least a portion of the communication path being within the first and second notches.

8. The MEMS device of claim 4 , wherein the second dielectric layer includes at least one edge and a plurality of notches in the at least one edge, at least a portion of the communication path being within the plurality of notches.

9. The MEMS device of claim 4 , wherein the communication path extends through the reflective element.

10. The MEMS device of claim 1 , further comprising an electrically conductive layer over a side of the flexible dielectric layer opposite the reflective element, the conductive layer in electrical communication with the reflective element.

11. The MEMS device of claim 1 , further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

12. The MEMS device of claim 11 , further comprising a driver circuit configured to send at least one signal to the display.

13. The MEMS device of claim 12 , further comprising a controller configured to send at least a portion of the image data to the driver circuit.

14. The MEMS device of claim 11 , further comprising an image source module configured to send said image data to said processor.

15. The MEMS device of claim 14 , wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

16. The MEMS device of claim 11 , further comprising an input device configured to receive input data and to communicate said input data to said processor.

17. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising:

second means for reflecting; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, the supporting means having a flexible dielectric portion; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

18. The MEMS device of claim 17 , wherein the first reflecting means comprises a first reflective layer.

19. The MEMS device of claim 17 , wherein the moving means comprises a movable functional element.

20. The MEMS device of claim 17 , wherein the second reflecting means comprises a second reflective layer.

21. The MEMS device of claim 17 , wherein the supporting means comprises a flexible dielectric layer.

22. The MEMS device of claim 17 , wherein the actuating means comprises at least one electrode.

23. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising:

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer, wherein the dielectric layer comprises SiO 2 .

24. The MEMS device of claim 23 , wherein the second reflective layer comprises aluminum.

25. The MEMS device of claim 23 , wherein the electrically conductive layer comprises aluminum.

26. The MEMS device of claim 23 , wherein the flexible layer comprises a flexible dielectric layer.

27. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising:

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer, wherein the flexible layer comprises nickel; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

28. The MEMS device of claim 27 , wherein the second reflective layer comprises aluminum.

29. The MEMS device of claim 27 , wherein the electrically conductive layer comprises aluminum.

30. A microelectromechanical (MEMS) device comprising:

at least one electrode;

a first reflective layer; and

a movable functional element comprising:

a flexible layer that flexes in response to voltages applied to the at least one electrode to move the functional element in a direction generally perpendicular to the first reflective layer, wherein the flexible layer comprises a flexible dielectric layer; and

a reflective element having a first portion mechanically coupled to the flexible layer and a second portion spaced from the flexible layer and defining a gap therebetween, the reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

31. The MEMS device of claim 30 , wherein the second reflective layer comprises aluminum.

32. The MEMS device of claim 30 , wherein the electrically conductive layer comprises aluminum.

33. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising:

second means for reflecting, the second reflecting means including a dielectric portion; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, wherein the supporting means comprises a flexible dielectric layer; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

34. The MEMS device of claim 33 , wherein the first reflecting means comprises a first reflective layer.

35. The MEMS device of claim 33 , wherein the moving means comprises a movable functional element.

36. The MEMS device of claim 33 , wherein the second reflecting means comprises a reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

37. The MEMS device of claim 33 , wherein the actuating means comprises at least one electrode.

38. A microelectromechanical (MEMS) device comprising:

first means for reflecting;

means for moving a portion of the device, the moving means comprising:

second means for reflecting, the second reflecting means including a dielectric portion; and

means for supporting the second reflecting means, a first portion of the supporting means mechanically coupled to the second reflecting means and a second portion of the supporting means spaced from the second reflecting means and defining a gap therebetween, wherein the supporting means comprises a layer of nickel; and

means for actuating the moving means to move the second reflecting means in a direction generally perpendicular to the first reflecting means.

39. The MEMS device of claim 38 , wherein the first reflecting means comprises a first reflective layer.

40. The MEMS device of claim 38 , wherein the moving means comprises a movable functional element.

41. The MEMS device of claim 38 , wherein the second reflecting means comprises a reflective element comprising:

a second reflective layer;

an electrically conductive layer in electrical communication with the second reflective layer via a communication path; and

a dielectric layer between the second reflective layer and the electrically conductive layer.

42. The MEMS device of claim 38 , wherein the actuating means comprises at least one electrode.