Magnetic recording medium and method of manufacturing the same
View Patent ↗Provided are a magnetic recording medium and a method of manufacturing the magnetic recording medium. The magnetic recording medium includes a substrate, a soft magnetic underlayer formed on the substrate, a texturing layer formed on the soft magnetic underlayer and including a uniform pattern, and a recording layer including magnetic grains and a non-magnetic boundary region isolating the magnetic grains. The magnetic grains and the non-magnetic boundary region of the recording layer are formed into a regular granular structure by segregation according to the regular pattern of the texturing layer. Therefore, a regular granular structure can be formed in the recording layer without a process such as etching of the recording layer, so that the recording density of the magnetic recording medium can be largely improved.
1. A method of manufacturing a magnetic recording medium comprising a soft magnetic underlayer, a texturing layer, and a recording layer which are sequentially laminated on a substrate, the method comprising
forming a regular pattern in a texturing layer by an imprint method, wherein the regular pattern is formed of isolated protruded portions and trenches surrounding the isolated protruded portions, and
forming the recording layer on the thus-obtained patterned texturing layer in such a way that the recording layer has a regular granular structure, the granular structure being formed of magnetic grains, which are formed corresponding to respective isolated protruded portions of the texturing layer, and a non-magnetic region, which is formed corresponding to the trenches.
2. The method of claim 1 , wherein the texturing layer comprises at least one of Ru, MgO, and Pt.
3. The method of claim 1 , wherein the magnetic grains of the recording layer comprise a Co-based or Fe-based magnetic alloy.
4. The method of claim 3 , wherein the magnetic grains of the recording layer comprise at least one material selected from the group consisting of CoPt, FePt, CoPd, FePd, and CoCrPt.
5. The method of claim 1 , wherein the non-magnetic region of the recording layer comprises a non-magnetic oxide or nitride.
6. The method of claim 5 , wherein the non-magnetic region of the recording layer comprises at least one material selected from the group consisting of SiO 2 , TiO 2 , ZrO 2 , and SiN.
7. The method of claim 1 , wherein the formation of the regular pattern in the texturing layer comprises:
forming a pattern in the soft magnetic underlayer using an imprint method; and
growing a texturing layer on the soft magnetic underlayer so as to form a pattern in the texturing layer, the pattern in the texturing layer being corresponding to the pattern of the soft magnetic underlayer.
8. The method of claim 7 , wherein the formation of the pattern in the soft magnetic underlayer comprises:
applying an imprint resin to the soft magnetic underlayer;
transferring a pattern to the imprint resin to form a patterned imprint resin on the soft magnetic underlayer;
etching the soft magnetic underlayer using the patterned imprint resin as a mask; and
removing the imprint resin.
9. The method of claim 8 , wherein the transferring of the pattern to the imprint resin is performed by thermal imprinting or ultraviolet (UV) imprinting.
10. The method of claim 1 , wherein the formation of the regular pattern in the texturing layer comprises:
forming an interlayer on a soft magnetic underlayer;
forming a pattern in the interlayer using an imprint method; and
growing a texturing layer on the interlayer so as to form a pattern corresponding to the pattern of the interlayer in the texturing layer.
11. The method of claim 10 , wherein the formation of the pattern in the interlayer comprises:
applying an imprint resin to the soft magnetic underlayer;
transferring a pattern to the imprint resin to form a patterned imprint resin on the soft magnetic underlayer;
depositing an interlayer on the patterned imprint resin; and
forming a pattern in the interlayer using a lift-off method.
12. The method of claim 10 , wherein the formation of the pattern in the interlayer comprises:
applying an imprint resin to the soft magnetic underlayer;
transferring a pattern to the imprint resin to form a patterned imprint resin on the soft magnetic underlayer; and
forming the interlayer by hardening the patterned imprint resin.
13. The method of claim 12 , wherein the imprint resin comprises an organo-silicon based polymer compound.
14. The method of claim 12 , wherein the transferring of the pattern to the imprint resin is performed by thermal imprinting or ultraviolet (UV) imprinting.
15. The method of claim 10 , wherein the formation of the pattern in the interlayer comprises:
applying an imprint resin to the interlayer;
transferring a pattern to the imprint resin to form a patterned imprint resin on the interlayer;
etching the interlayer using the patterned imprint resin as a mask; and
removing the imprint resin.
16. The method of claim 15 , wherein the interlayer is formed of one of a non-magnetic metal, an oxide, a nitride, and a polymer compound.
17. The method of claim 15 , wherein the transferring of the pattern to the imprint resin is performed by thermal imprinting or ultraviolet (UV) imprinting.