IP Library Granted Patent US 7,573,925
Granted Patent B1
US 7,573,925 · App. 11/749,013 · Granted Aug 11, 2009

Semiconductor laser having a doped active layer

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Quick Facts
Patent No.
US 7,573,925
App. No.
11/749,013
Granted
Aug 11, 2009
Kind
B1
Abstract

Semiconductor lasers having a doped active region. In one example embodiment, a laser includes a substrate and a doped active region positioned above the substrate. The doped active region includes a plurality of quantum wells separated by a plurality of barrier layers. The quantum wells and the barrier layers are doped with a doping material with a concentration between about 1*10^16/cm3 to about 1*10^17/cm3.

Claims (70)

1. A DFB laser, comprising:

a substrate;

a mode modifier layer positioned above the substrate;

a buffer layer positioned above the mode modifier layer;

a first confinement layer positioned above the buffer layer;

a second confinement layer positioned above the first confinement layer;

a doped active region positioned above the second confinement layer, the doped active region comprising:

a plurality of quantum wells separated by a plurality of barrier layers, wherein the quantum wells and the barrier layers are doped with a doping material with a concentration between about 1*10^16/cm 3 to about 1*10^17/cm 3 ;

a third confinement layer positioned above the doped active region;

a fourth confinement layer positioned above the third confinement layer;

a first spacer layer positioned above the fourth confinement layer;

an etch stop layer positioned above the first spacer layer;

a second spacer layer positioned above the etch stop layer;

a grating layer positioned above the second spacer layer; and

a top layer positioned above the grating layer.

2. The laser as recited in claim 1 , wherein the substrate is a p-type substrate and the doping material is an n-type doping material.

3. The laser as recited in claim 1 , wherein the substrate is an n-type substrate and the doping material is a p-type doping material.

4. The laser as recited in claim 1 , wherein the doping material comprises beryllium.

5. The laser as recited in claim 1 , wherein the doping material comprises carbon.

6. The laser as recited in claim 1 , wherein the doping material comprises zinc.

7. The laser as recited in claim 6 , wherein the quantum wells and the barrier layers are doped with a doping material with a concentration of about 5*10^16/cm 3 .

8. The laser as recited in claim 1 , further wherein:

the substrate, the mode modifier layer, the first confinement layer, and the second confinement layer are n-type layers;

the third confinement layer, the fourth confinement layer, the first spacer layer, the etch stop layer, the second spacer layer, and the grating layer are p-type layers; and

the doping material is a p-type material.

9. The laser as recited in claim 1 , further wherein:

the substrate, the mode modifier layer, the first confinement layer, and the second confinement layer are p-type layers; and

the third confinement layer, the fourth confinement layer, the first spacer layer, the etch stop layer, the second spacer layer, and the grating layer are n-type layers; and

the doping material is an n-type material.

10. A TOSA comprising:

a housing; and

the laser as recited in claim 1 positioned within the housing.

11. An optical transceiver module comprising:

the TOSA as recited in claim 10 ;

a ROSA; and

a PCB in electrical communication with the TOSA and the ROSA.

12. A DFB laser, comprising:

an n-type substrate;

an n-type mode modifier layer positioned above the n-type substrate;

a buffer layer positioned above the n-type mode modifier layer;

a first n-type confinement layer positioned above the buffer layer;

a second n-type confinement layer positioned above the n-type first confinement layer;

a doped active region positioned above the second n-type confinement layer, the doped active region comprising:

a plurality of quantum wells separated by a plurality of barrier layers, wherein the quantum wells and the barrier layers are doped with a p-type zinc material with a concentration between about 1*10^16/cm 3 to about 5*10^16/cm 3 ;

a first p-type confinement layer positioned above the doped active region;

a second p-type confinement layer positioned above the first p-type confinement layer;

a first p-type spacer layer positioned above the second p-type confinement layer;

a p-type etch stop layer positioned above the first p-type spacer layer;

a second p-type spacer layer positioned above the p-type etch stop layer;

a p-type grating layer positioned above the second p-type spacer layer; and

a top layer positioned above the p-type grating layer.

13. The DFB laser as recited in claim 12 , wherein the doping material has a concentration of about 5*10^16/cm3.

14. The DFB laser as recited in claim 12 , wherein the DFB laser is configured to operate at 10 Gbit.

15. A TOSA comprising:

a housing; and

the DFB laser as recited in claim 12 positioned within the housing.

16. An optical transceiver module comprising:

the TOSA as recited in claim 15 ;

a ROSA; and

a PCB in electrical communication with the TOSA and the ROSA.

17. A DFB laser, comprising:

a substrate;

a mode modifier layer positioned above the substrate;

a buffer layer positioned above the mode modifier layer;

a doped active region positioned above the buffer layer, the doped active region comprising:

a plurality of quantum wells separated by a plurality of barrier layers, wherein the quantum wells and the barrier layers are doped with a doping material,

wherein an emission wavelength of the DFB laser is about 1310 nm or greater.

18. The DFB laser of claim 17 , wherein the mode modifier is associated with a coupling of second-order transverse modes away from the active region of the DFB laser.

19. The DFB laser of claim 17 , wherein a concentration of the doping material is between about 1*10^16/cm 3 to about 1*10^17/cm 3 .

20. An optoelectronic transceiver having a TOSA that includes the DFB laser of claim 17 .

Assignments (5)
PATENT RELEASE AND REASSIGNMENT Recorded Jul 5, 2022
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
Reel/Frame 060574/0001 →
SECURITY INTEREST Recorded Jul 1, 2022
From: II-VI INCORPORATED; II-VI DELAWARE, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; PHOTOP TECHNOLOGIES, INC.; COHERENT, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 060562/0254 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2020
From: FINISAR CORPORATION
To: II-VI DELAWARE, INC.
Reel/Frame 052286/0001 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Sep 25, 2019
From: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 050484/0204 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE'S STATE PREVIOUSLY RECORDED AT REEL: 019637 FRAME: 0318. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Feb 13, 2017
From: YOUNG, DAVID BRUCE; HA, YUK LUNG; VERMA, ASHISH; ENG, LARS
To: FINISAR CORPORATION
Reel/Frame 041697/0135 →