Laser facet pre-coating etch for controlling leakage current
View Patent ↗A method for etching facets of a laser die prior to coating in such a way as to control the formation of oxides and metallic films on the facet is disclosed. In one embodiment, the method includes placing a wafer on which the laser is included in the interior volume of an etching chamber. Nitrogen is introduced into the interior volume to define a nitrogen-rich environment. The laser facet is then etched in the nitrogen-rich environment with argon delivered from an ion gun. In another embodiment, the method includes placing the laser in an ion beam etching chamber, then physically etching the facet of the laser with an ion beam that includes an argon/nitrogen mixture. The laser facet(s) can then be coated as desired. The etching method reduces the incidence of leakage current during operation of the laser die caused by metallic film formation on the facet before coating.
1. A method for etching a facet of a laser die, the method comprising:
etching the facet utilizing a mixture of a noble gas and nitrogen, wherein the facet is etched utilizing a mixture of a noble gas and nitrogen so as to remove an oxide from a surface of the facet while preventing formation of a metallic film on the facet.
2. The method for etching as defined in claim 1 , wherein the noble gas is argon.
3. The method for etching as defined in claim 1 , wherein etching the facet further comprises:
etching the facet utilizing an ion beam.
4. The method for etching as defined in claim 2 , wherein the laser die is included on a wafer positioned in an interior volume of an etching chamber, and wherein etching the facet further comprises:
passing the argon through an ion gun.
5. The method for etching as defined in claim 4 , wherein the etching the facet further comprises:
passing the nitrogen intermixed with the argon through the ion gun.
6. The method for etching as defined in claim 1 , wherein the laser die is a distributed feedback laser.
7. A method for etching a facet of a laser die, the laser die included on a wafer, the method comprising:
placing the wafer in an interior volume of an etching chamber;
introducing nitrogen into the interior volume to define a nitrogen-rich environment; and
etching the facet in the nitrogen-rich environment with argon delivered from an ion gun.
8. The method for etching as defined in claim 7 , wherein introducing nitrogen further comprises:
introducing molecular nitrogen into the interior volume.
9. The method for etching as defined in claim 8 , wherein introducing nitrogen further comprises:
introducing the nitrogen into the interior volume via an inlet defined in the etching chamber.
10. The method for etching as defined in claim 7 , wherein etching the facet removes oxide and metallic material from the facet.
11. A method for preparing a facet of a distributed feedback laser for coating, the method comprising:
placing the laser in an ion beam etching chamber; and
physically etching the facet of the laser with an ion beam, the ion beam including argon and nitrogen, wherein the facet of the laser is etched with the ion beam including argon and nitrogen so as to remove an oxide from a surface of the facet while preventing formation of a metallic film on the facet.
12. The method for preparing as defined in claim 11 , wherein the ion beam is composed of:
approximately 12 sccm of argon; and
approximately at least 25 sccm of nitrogen.
13. The method for preparing as defined in claim 12 , wherein physically etching further comprises:
physically etching the facet of the laser with an ion beam, the ion beam including argon and nitrogen, the ion beam being ejected from an ion gun.
14. The method for preparing as defined in claim 13 , wherein the nitrogen is in ionic form when ejected from the ion gun.
15. The method for preparing as defined in claim 14 , wherein the ion beam is composed of a concentration of approximately 30 sccm of nitrogen.
16. The method for preparing as defined in claim 15 , wherein the physical etch controls reverse leakage of the laser.
17. The method for preparing as defined in claim 16 , wherein the physical etch controls electrostatic discharge of the laser.
18. The method for etching as defined in claim 1 , wherein the metallic film that is prevented from forming is one of an indium metallic film, a gallium metallic film, an aluminum metallic film, or a combination thereof.