Electroconductive laminate, and electromagnetic wave shielding film and protective plate for plasma display
View Patent ↗Provided is an electroconductive laminate having a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has a multilayer structure having an oxide layer and a metal layer alternately laminated from the substrate side in a total layer number of (2n+1) (wherein n is an integer of at least 1); the oxide layer predominantly contains zinc oxide and titanium oxide having a refractive index of at least 2.3; the oxide layer has an atomic ratio of titanium to a total amount of titanium and zinc of 15-50 atomic %; and the metal layer predominantly contains silver or a silver alloy. Also provided is a process for producing the electroconductive laminate.
1. An electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein the electroconductive film has a multilayer structure having an oxide layer and a metal layer alternately laminated from the substrate side in a total layer number of (2n+1) (wherein n is an integer of at least 1); the oxide layer predominantly comprises zinc oxide and titanium oxide having a refractive index of at least 2.3; the oxide layer has an atomic ratio of titanium to a total amount of titanium and zinc of 15-50 atomic %; and the metal layer predominantly comprises silver or a silver alloy.
2. The electroconductive laminate according to claim 1 , wherein two to eight metal layers are provided.
3. The electroconductive laminate according to claim 2 , wherein the metal layer is made of pure silver or a silver alloy containing gold and/or bismuth.
4. The electroconductive laminate according to claim 1 , wherein the metal layer is made of pure silver or a silver alloy containing gold and/or bismuth.
5. An electromagnetic wave shielding film for a plasma display, which is the electroconductive laminate as defined in any of claim 1 , 2 , 3 or 4 .
6. A protective plate for a plasma display, comprising a support, the electromagnetic wave shielding film for a plasma display as defined in claim 5 formed on the support, and an electrode electrically in contact with the electroconductive film of the electromagnetic wave shielding film for a plasma display.
7. The protective plate for a plasma display according to claim 6 , which further comprises an electroconductive mesh film.
8. The electroconductive laminate according to claim 1 , wherein the oxide layer has an atomic ratio of titanium to a total amount of titanium and zinc of 20-50 atomic %.
9. A process for producing an electroconductive laminate comprising a substrate and an electroconductive film formed on the substrate, wherein said process comprises:
(A) forming an oxide layer by sputtering using a mixed target of zinc oxide and titanium oxide having a refractive index of at least 2.3, wherein the oxide layer has an atomic ratio of titanium to a total amount of titanium and zinc of 15-50 atomic %; and
(B) forming a metal layer by sputtering using a silver target or a silver alloy target, on the surface of the substrate,
wherein said forming (A) and said forming (B) are repeatedly carried out 2n times (wherein n is an integer of at least 1), and finally the oxide layer is formed by said forming (A) to form the electroconductive film.
10. The process according to claim 9 , wherein the oxide layer has an atomic ratio of titanium to a total amount of titanium and zinc of 20-50 atomic %.