Nozzle plate usable with inkjet printhead
View Patent ↗A nozzle plate usable with an inkjet printhead includes a substrate through which a plurality of nozzles are formed, an ink-philic material layer formed on an outer surface of the substrate and inner walls of the nozzles, and a plurality of nonwetting coating layers sequentially formed on the ink-philic material layer formed on the outer surface of the substrate, each nonwetting coating layer including an adhesive layer and an ink-phobic material layer deposited on the adhesive layer.
1. A nozzle plate usable with an inkjet printhead, the nozzle plate comprising:
a substrate through which a plurality of nozzles are formed;
an ink-philic material layer formed on an outer surface of the substrate and inner walls of the nozzles; and
a plurality of nonwetting coating layers sequentially formed on the ink-philic material layer formed on the outer surface of the substrate, each nonwetting coating layer including an adhesive layer and an ink-phobic material layer deposited on the adhesive layer wherein each of the adhesive layer and ink-phobic material layer has a substantially uniform thickness and both of the adhesive layer and ink-phobic material layer totally cover the outer surface thereby each having holes coinciding with the nozzles.
2. The nozzle plate of claim 1 , wherein the substrate is formed of silicon.
3. The nozzle plate of claim 2 , wherein the ink-philic material layer is formed of thermally oxidized silicon.
4. The nozzle plate of claim 3 , wherein the adhesive layer is formed of deposited silicon oxide.
5. The nozzle plate of claim 4 , wherein the adhesive layer is formed using a physical vapor deposition (PVD) process.
6. The nozzle plate of claim 4 , wherein the ink-phobic material layer is formed of perfluorinated silane.
7. The nozzle plate of claim 6 , wherein the ink-phobic material layer is formed using a PVD process.
8. The nozzle plate of claim 1 , wherein two nonwetting coating layers are formed on the ink-philic material layer formed on the outer surface of the substrate.
9. A method of forming a nozzle plate usable with an inkjet printhead, the method comprising:
forming a plurality of nozzles on a substrate;
forming an ink-philic material layer on an outer surface of the substrate and inner walls of the nozzles; and
forming a plurality of nonwetting coating layers sequentially on the ink-philic material layer formed on the outer surface of the substrate, each nonwetting coating layer including an adhesive layer formed by coating and an ink-phobic material layer coated on the adhesive layer wherein each of the adhesive layer and ink-phobic material layer has a substantially uniform thickness and both of the adhesive layer and ink-phobic material layer totally cover the outer surface thereby each having holes coinciding with the nozzles.
10. A nozzle plate usable with an inkjet printhead, the nozzle plate comprising:
a substrate having a nozzle;
an ink-philic material layer formed on an outer surface of the substrate and an inner wall of the nozzle;
a first adhesive layer formed on the ink-philic material layer;
a first ink-phobic material layer formed on the first adhesive layer;
a second adhesive layer formed on the first ink-phobic material layer; and
a second ink-phobic material layer formed on the second adhesive layer.
11. The nozzle plate of claim 10 , wherein the first adhesive layer has a first thickness, and each of the first and second ink-phobic material layers has a second thickness.
12. The nozzle plate of claim 11 , wherein the first adhesive layer has surface having a first surface roughness, and each of the first and second ink-phobic material layers has a second surface roughness.
13. The nozzle plate of claim 10 , wherein the second adhesive layer has a first thickness, and each of the first and second ink-phobic material layers has a second thickness.
14. The nozzle plate of claim 13 , wherein the second adhesive layer has a surface having a first surface roughness, and each of the first and second ink-phobic material layers has a second surface having a second surface roughness.
15. The nozzle plate of claim 10 , wherein the first and second ink-phobic material layers have different surface roughness than each other.
16. The nozzle plate of claim 10 , wherein the first and second ink-phobic material layers have a same thickness as each other.
17. The nozzle plate of claim 10 , wherein the first and second ink-phobic material layers comprises a first ink-phobic material layer having a first thickness and a second ink-phobic material layer having a second thickness.
18. The nozzle plate of claim 10 , wherein the first and second ink-phobic material layers comprises a first ink-phobic material layer having a first surface roughness and a second ink-phobic material layer having a second surface roughness.
19. An inkjet printhead, comprising:
a layer formed with a pressure chamber to contain ink; and
a nozzle plate having a substrate through which a nozzle is formed to eject the ink from the pressure chamber, an ink-philic material layer formed on an outer surface of the substrate and an inner wall of the nozzle, and a plurality of nonwetting coating layers sequentially formed on the ink-philic material layer formed on the outer surface of the substrate, each nonwetting coating layer including an adhesive layer and an ink-phobic material layer deposited on the adhesive layer,
wherein each of the adhesive layer and ink-phobic material layer has a substantially uniform thickness and both of the adhesive layer and ink-phobic material layer totally cover the outer surface thereby each having holes coinciding with the nozzles.