Fabrication of self-aligned via holes in polymer thin films
View Patent ↗A low-cost and efficient process produces self-aligned vias in dielectric polymer films that provides electrical connection between a top conductor and a bottom conductor. The process is achieved by printing conductive posts on the first patterned conductive layer, followed by the deposition of an unpatterned layer dielectric, followed by the deposition of a second patterned conductive layer. The vias are formed during the flash annealing of the post after the dielectric is deposited, but before the second conductive layer is deposited. In this process, the post material is annealed with a flash of light, resulting in a release of energy which removes the dielectric on the top of the post.
1. A method for forming a self-aligned via in a dielectric layer to provide electrical contact between a first conductive layer and a second conductive layer, the method comprising the steps of:
(a) providing a substrate comprising the first metal layer, a post formed from a conductive post material, and the dielectric layer, wherein the post abuts the first metal layer, and wherein the dielectric layer covers the post and at least a portion of the first metal layer;
(b) removing dielectric material from a top surface of the post by annealing the post; and
(c) forming the second conductive layer abutting the top surface of the post.
2. The method of claim 1 , further comprising fabricating a top gate organic transistor, where the first conductive layer is used as a source/drain of the transistor and the second conductive layer is used as a gate of the transistor.
3. The method of claim 1 , further comprising fabricate a bottom gate organic transistor, where the first conductive layer is used as a gate of the transistor and the second conductive layer is used as a source/drain of the transistor.
4. The method of claim 1 , wherein the dielectric layer is deposited without patterning.
5. The method of claim 1 , wherein the post material is a fluid placed by printing means.
6. The method of claim 1 , wherein the post material is a fluid placed by inkjet printing, flexography, gravure, or screen printing.
7. The method of claim 1 , wherein a height of the dielectric is lower than a height of the post.
8. The method of claim 1 , wherein removing dielectric material from the top surface of the post compromises flash annealing the post material.
9. The method of claim 1 , wherein removing the dielectric material from the top surface of the post comprises thermally annealing the post material.
10. The method of claim 1 , further comprising removing a hydrophobic dielectric material on the top surface of the post by using hydrophilic post materials.
11. The method of claim 1 , further comprising removing a hydrophilic dielectric material on the top surface of the post by using hydrophobic post materials.
12. The method of claim 1 , further comprising covering the post with a sacrificial polymer.
13. A method of forming vias in a printed organic FET circuit comprising:
providing first metal layer;
forming ink posts on the surface of the first metal layer;
forming a dielectric layer over the ink posts whereby the posts are embedded in the dielectric layer;
annealing the ink posts to expose a top surface of the inks posts; and
depositing a second metal layer over the dielectric layer to provide a conductive path from the second metal layer to the first metal layer through the annealed ink posts.
14. The method of claim 13 , wherein annealing the ink posts comprises a method selected from the group consisting of flash annealing and thermal annealing.