Method and system for controlling resistivity in ingots made of compensated feedstock silicon
View Patent ↗Techniques for controlling resistivity in the formation of a silicon ingot from compensated feedstock silicon material prepares a compensated, upgraded metallurgical silicon feedstock for being melted to form a silicon melt. The compensated, upgraded metallurgical silicon feedstock provides a predominantly p-type semiconductor for which the process assesses the concentrations of boron and phosphorus and adds a predetermined amount of aluminum or/and gallium. The process further melts the silicon feedstock together with a predetermined amount of aluminum or/and gallium to form a molten silicon solution from which to perform directional solidification and, by virtue of adding aluminum or/and gallium, maintains the homogeneity the resistivity of the silicon ingot throughout the silicon ingot. In the case of feedstock silicon leading to low resistivity in respective ingots, typically below 0.4 Ωcm, a balanced amount of phosphorus can be optionally added to aluminum or/and gallium. Adding phosphorus becomes mandatory at very low resistivity, typically close to 0.2 Ωcm and slightly below.
1. A method for controlling resistivity in the formation of a silicon ingot, comprising the steps of:
preparing a compensated, upgraded metallurgical silicon feedstock for being melted to form a silicon melt, said compensated, upgraded metallurgical silicon feedstock comprising a predominantly p-type semiconductor;
assessing quantitatively the relative concentrations of boron and phosphorus in said compensated, upgraded metallurgical silicon feedstock;
adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of an element from the group consisting of aluminum, gallium, mixtures of aluminum and gallium, or other Group III elements, wherein said quantitatively assessed relative concentrations of boron and phosphorous determine said greater-than-zero quantity;
melting said upgraded metallurgical silicon feedstock and said greater-than-zero quantity of said element to form a molten silicon solution including said greater-than-zero quantity of said element; and
performing a directional solidification of said molten silicon solution for forming a silicon ingot and, by virtue of said adding said greater-than-zero quantity of said element, suppressing the transition of said silicon ingot to n-type material by virtue of reducing the effect of differing boron and phosphorous segregation coefficients.
2. The method of claim 1 , wherein said preparing step further comprises the step of preparing a compensated, upgraded metallurgical silicon feedstock having an initial resistivity ranging between approximately 0.15 Ωcm and 5.0 Ωcm.
3. The method of claim 1 , wherein said assessing step further derives from a determination of the axial resistivity of a compensated, upgraded metallurgical silicon reference sample.
4. The method of claim 1 , wherein said preparing step further comprises the step of preparing a compensated, upgraded metallurgical silicon feedstock having a resistivity above approximately 0.5 Ωcm.
5. The method of claim 1 , wherein said preparing step further comprises the step of preparing a compensated, upgraded metallurgical silicon feedstock having a resistivity ranging between approximating 0.15 Ωcm and 0.5 Ωcm.
6. The method of claim 1 , wherein said adding step further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of aluminum, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity ranging between approximating 0.15 Ωcm and 0.5 Ωcm.
7. The method of claim 1 , wherein said adding further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of aluminum and a greater-than-zero quantity of phosphorus, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity is less than approximately 0.4 Ωcm.
8. The method of claim 1 , wherein said adding step further comprises the step of optionally adding to said compensated, upgraded metallurgical silicon feedstock a combination of aluminum and phosphorus, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity ranges between approximately 0.15 Ωcm and 0.5 Ωcm.
9. The method of claim 1 , wherein said adding further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of gallium.
10. The method of claim 1 , wherein said adding step further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of gallium, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity ranges between approximating 0.15 Ωcm and 0.5 Ωcm.
11. The method of claim 1 , wherein adding said further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a greater-than-zero quantity of gallium and a greater-than-zero quantity of phosphorus, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity is less than approximately 0.4 Ωcm.
12. The method of claim 1 , wherein adding step further comprises the step of optionally adding to said compensated, upgraded metallurgical silicon feedstock a combination of gallium and phosphorus, wherein the compensated, upgraded metallurgical silicon feedstock having the initial resistivity ranges between approximately 0.15 Ωcm and 0.5 Ωcm.
13. The method of claim 1 , wherein said adding further comprises the step of adding to said compensated, upgraded metallurgical silicon feedstock a mixture of a greater-than-zero quantity of aluminum and a greater-than-zero quantity of gallium.
14. The method of claim 1 , wherein said performing step further comprises the step of yielding a silicon ingot comprising an essentially uniform p-type doping distribution throughout said silicon ingot.
15. The method of claim 1 , wherein said performing step further comprises the step of yielding a silicon ingot comprising an essentially 100% p-type material with approximately 95% of said silicon ingot having resistivity ranging between 0.53 Ωcm and 0.76 Ωcm.
16. The method of claim 1 , wherein said performing step further comprises the step of yielding a silicon ingot comprising an essentially 100% p-type material with approximately 95% of said silicon ingot having resistivity ranging between 0.43 Ωcm and 0.98 Ωcm.
17. The method of claim 1 , wherein said suppressing step further comprises suppressing the transition of said silicon ingot to n-type material to reduce of p-type material by at least ten percent.