Electromechanical device with optical function separated from mechanical and electrical function
View Patent ↗In certain embodiments, a microelectromechanical (MEMS) device comprises a substrate having a top surface, a movable element over the substrate, and an actuation electrode disposed laterally from the reflective surface. The movable element comprises a deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving in a direction generally perpendicular to the top surface of the substrate.
1. An electromechanical device comprising:
a substrate;
a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and
an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction towards the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.
2. The electromechanical device of claim 1 , wherein the reflective element is mechanically coupled to a top surface of the deformable layer.
3. The electromechanical device of claim 1 , wherein the reflective element is mechanically coupled to a bottom surface of the deformable layer.
4. The electromechanical device of claim 1 , wherein the movable element further comprises at least one connecting element, the at least one connecting element mechanically coupling the reflective element to the deformable layer.
5. The electromechanical device of claim 4 , wherein a first connecting element is mechanically coupled to a first edge of the reflective element and a second connecting element is mechanically coupled to a second edge of the reflective element, the first edge substantially opposite the second edge.
6. The electromechanical device of claim 4 , wherein the reflective element has a plurality of edges and wherein the at least one connecting element mechanically couples each edge of the reflective element to the deformable layer.
7. The electromechanical device of claim 4 , wherein the at least one connecting element comprises at least one protrusion extending from the reflective element.
8. The electromechanical device of claim 1 , wherein the reflective surface is not in contact with a top surface of the substrate when an actuation voltage difference is applied between the actuation electrode and the deformable layer.
9. The electromechanical device of claim 1 , wherein a distance between the reflective surface and a top surface of the substrate is greater than a distance between the deformable layer and the top surface of the substrate.
10. The electromechanical device of claim 1 , wherein a distance between the deformable layer and a top surface of the substrate is greater than a distance between the reflective surface and the top surface of the substrate.
11. The electromechanical device of claim 1 , wherein the stationary portion of the device comprises a top surface of the substrate.
12. The electromechanical device of claim 1 , wherein the stationary portion of the device comprises a top surface of the actuation electrode.
13. The electromechanical device of claim 1 , wherein the stationary portion of the device comprises a top surface of an insulating layer between the actuation electrode and the deformable layer.
14. The electromechanical device of claim 1 , wherein application of a voltage difference between the actuation electrode and the deformable layer causes displacement of the deformable layer and displacement of the reflective surface, the displacement of the deformable layer parallel to the displacement of the reflective surface, the displacement of the deformable layer on a different plane than the displacement of the reflective surface.
15. The electromechanical device of claim 1 , wherein the substrate is at least partially transparent.
16. The electromechanical device of claim 1 , wherein the reflective element is configured to reflect a first color in the first position and to reflect a second color in the second position.
17. The electromechanical device of claim 1 , wherein the reflective element is completely reflective.
18. The electromechanical of claim 1 , further comprising an other actuation electrode over the movable element, the movable element responsive to a voltage difference applied between the other actuation electrode and the movable element by moving away from the substrate.
19. The electromechanical device of claim 18 , further comprising an insulating layer between the other actuation electrode and the movable element.
20. The electromechanical device of claim 19 , wherein the insulating layer is formed on an upper surface of the movable element.
21. The electromechanical device of claim 19 , wherein the insulating layer is formed on a lower surface of the other actuation electrode.
22. The electromechanical device of claim 1 , further comprising:
a display;
a processor that is configured to communicate with said display, said processor being configured to process image data; and
a memory device that is configured to communicate with said processor.
23. The electromechanical device of claim 22 , further comprising a driver circuit configured to send at least one signal to the display.
24. The electromechanical device of claim 23 , further comprising a controller configured to send at least a portion of the image data to the driver circuit.
25. The electromechanical device of claim 22 , further comprising an image source module configured to send said image data to said processor.
26. The electromechanical device of claim 25 , wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.
27. The electromechanical device of claim 22 , further comprising an input device configured to receive input data and to communicate said input data to said processor.
28. An electromechanical device comprising:
a substrate;
a movable element over the substrate, the movable element comprising an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer, the reflective element including a reflective surface, the reflective surface spaced from the deformable layer along a direction generally parallel to the reflective surface; and
an actuation electrode under at least a portion of the deformable layer and disposed laterally from the reflective surface, the movable element responsive to a voltage difference applied between the actuation electrode and the deformable layer by moving in a direction away from the substrate, wherein a stationary portion of the device is configured to act as a stop for movement of the movable element, the movable element responsive to the voltage difference applied between the actuation electrode and the deformable layer by moving from a first position in which a portion of the movable element is not in contact with the stationary portion to a second position in which the portion is in contact with the stationary portion.
29. The electromechanical device of claim 28 , wherein application of a voltage difference between the actuation electrode and the deformable layer causes displacement of the deformable layer and displacement of the reflective surface, the displacement of the deformable layer parallel to the displacement of the reflective surface, the displacement of the deformable layer on a different plane than the displacement of the reflective surface.
30. The electromechanical device of claim 28 , further comprising an insulating layer between the actuation electrode and the movable element.
31. The electromechanical device of claim 30 , wherein the insulating layer is formed on an upper surface of the movable element.
32. The electromechanical device of claim 30 , wherein the insulating layer is formed on a lower surface of the actuation electrode.
33. An electromechanical device comprising:
a movable element comprising a deformable layer and a reflective element, the deformable layer extending along at least two sides of the reflective element, the reflective element mechanically coupled to the deformable layer at least partially by a connecting element on the at least two sides; and
an actuation electrode under at least a portion of the deformable layer along the at least two sides of the reflective element.