Method of automatic fluid dispensing for imprint lithography processes
View Patent ↗Disclosed herein is an automatic fluid dispensing method and system for dispensing fluid on the surface of a plate-like material, or substrate, including a semiconductor wafer for imprint lithography processes. The dispensing method uses fluid dispenser and a substrate stage that may generate relative lateral motions between a fluid dispenser tip a substrate. Also described herein are methods and devices for creating a planar surface on a substrate using a substantially unpatterned planar template.
1. A method of forming a layer on a substrate, said method comprising:
disposing a curable liquid solely on said substrate as a predetermined pattern of a plurality of spaced-apart droplets, said curable liquid provided with a viscosity of less than about 20 centipoises, measured at 25° C., and a surface area less than the surface area of an imprint lithography template;
contacting said curable liquid with a patterning area of said imprint lithography template to spread said curable liquid in said plurality of spaced-apart droplets such that adjacent droplets of said plurality of spaced-apart droplets merge together to form a contiguous layer of said curable liquid over a region of said substrate in superimposition with said patterning area and substantially fill a contiguous gap defined between said template and said substrate with said curable liquid, with said plurality of spaced-apart droplets being arranged in said predetermined pattern to minimize trapping of a gas in said contiguous layer as said droplets merge to form said contiguous layer; and
solidifying said curable liquid in said contiguous layer to form a solidified layer by curing said curable liquid with light passing through said imprint lithography template.
2. A method of forming a layer on a substrate, said method comprising:
disposing a curable liquid solely on said substrate as a predetermined pattern of a plurality of spaced-apart droplets, said curable liquid provided with a viscosity of less than about 5 centipoises, measured at 25° C., and a surface area less than the surface area of an imprint lithography template;
contacting said curable liquid with a patterning area of said imprint lithography template to spread said curable liquid in said plurality of spaced-apart droplets such that adjacent droplets of said plurality of spaced-apart droplets merge together to form a contiguous layer of said curable liquid over a region of said substrate in superimposition with said patterning area and substantially fill a contiguous qap defined between said template and said substrate with said curable liquid, with said plurality of spaced-apart droplets being arranged in said predetermined pattern to minimize trapping of a gas in said contiguous layer as said droplets merge to form said contiguous layer; and
solidifying said curable liquid in said contiguous layer to form a solidified layer by curing said curable liquid with light passing through said imprint lithography template.